Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering

2011 ◽  
Vol 51 (7) ◽  
pp. 1207-1212 ◽  
Author(s):  
E.L. Prociów ◽  
T. Chodzinski
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Electrical And Optical Properties

Electrical and optical properties of zinc oxide thin films grown by reactive magnetron sputtering method

2004 ◽  
Vol 109 (1-3) ◽  
pp. 241-244 ◽  
Author(s):  
Kh.A. Abdullin ◽  
A.B. Aimagambetov ◽  
N.B. Beisenkhanov ◽  
A.T. Issova ◽  
B.N. Mukashev ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties
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