Electrostatic discharge failure analysis of capacitive RF MEMS switches

2007 ◽  
Vol 47 (9-11) ◽  
pp. 1818-1822 ◽  
Author(s):  
J. Ruan ◽  
N. Nolhier ◽  
M. Bafleur ◽  
L. Bary ◽  
F. Coccetti ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Rf Mems ◽  
Electrostatic Discharge ◽  
Mems Switches ◽  
Rf Mems Switches

Reliability and Failure Analysis of RF MEMS Switches

2002 ◽  
Author(s):  
Ingrid De Wolf ◽  
Anne Jourdain ◽  
Ann Witvrouw ◽  
Paolo Fiorini ◽  
Harrie A. C. Tilmans ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Rf Mems ◽  
Optical Investigation ◽  
Capacitive Switches ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Lifetime Testing

Abstract In this paper we discuss reliability and failure analysis issues of RF-MEMS capacitive switches. We describe specific instrumentation and methods that can be used for testing and examination of these switches. These include SEM, AFM, SAM, static and dynamic optical investigation and electrical lifetime testing. Processing as well as testing and packaging issues are discussed.

Failure analysis and detection methodology for capacitive RF-MEMS switches based on BEOL BiCMOS process

2013 ◽  
Vol 53 (9-11) ◽  
pp. 1659-1662
Author(s):  
N. Torres Matabosch ◽  
F. Coccetti ◽  
M. Kaynak ◽  
B. Espana ◽  
B. Tillack ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Bicmos Process

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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