Evaluation of closed-vessel microwave digestion method for the determination of trace impurities in polymer-based photoresist by inductively coupled plasma mass spectrometry
2004 ◽
Vol 78
(2)
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pp. 163-166
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2003 ◽
Vol 20
(1)
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pp. 44-56
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2006 ◽
Vol 565
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pp. 214-221
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2017 ◽
Vol 40
(5)
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pp. e12528
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2000 ◽
Vol 64
(1)
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pp. 73-84
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2016 ◽
Vol 44
(2)
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pp. 273-280
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1996 ◽
Vol 355
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pp. 120-128
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2007 ◽
Vol 598
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pp. 214-218
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