scholarly journals Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

2012 ◽  
Vol 97 ◽  
pp. 162-165 ◽  
Author(s):  
S.M. Sultan ◽  
O.D. Clark ◽  
T.B. Masaud ◽  
Q. Fang ◽  
R. Gunn ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition

scholarly journals Characteristics of a nickel thin film and formation of nickel silicide by using remote plasma atomic layer deposition with Ni( i Pr-DAD)2

2015 ◽  
Vol 66 (5) ◽  
pp. 821-827 ◽  
Author(s):  
Jinho Kim ◽  
Woochool Jang ◽  
Jingyu Park ◽  
Heeyoung Jeon ◽  
Hyunjung Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nickel Silicide ◽  
Remote Plasma ◽  
Layer Deposition

Characteristics of Silicon Oxide Thin Film Deposited via Remote Plasma Atomic Layer Deposition

2021 ◽  
Vol 10 (4) ◽  
pp. 043005
Author(s):  
Chanwon Jung ◽  
Seokhwi Song ◽  
Namgue Lee ◽  
Youngjoon Kim ◽  
Eun Jong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Remote Plasma ◽  
Layer Deposition
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