Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

A. Dominget; J. Farkas; S. Szunerits

doi:10.1016/j.mee.2006.10.035

Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

Microelectronic Engineering ◽

10.1016/j.mee.2006.10.035 ◽

2006 ◽

Vol 83 (11-12) ◽

pp. 2355-2358 ◽

Cited By ~ 5

Author(s):

A. Dominget ◽

J. Farkas ◽

S. Szunerits

Keyword(s):

Surface Potential ◽

Scanning Probe Microscopy ◽

Kelvin Probe Force Microscopy ◽

Scanning Probe ◽

Kelvin Probe ◽

Probe Microscopy ◽

Force Microscopy ◽

Scanning Kelvin Probe ◽

Surface Potential Measurements

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Scanning Probe Microscopy: Ultrasonic Force and Scanning Kelvin Probe Force Microscopy

Nondestructive Materials Characterization - Springer Series in Materials Science ◽

10.1007/978-3-662-08988-0_12 ◽

2004 ◽

pp. 323-355

Author(s):

C. Druffner ◽

E. Schumaker ◽

S. Sathish ◽

G. S. Frankel ◽

P. Leblanc

Keyword(s):

Scanning Probe Microscopy ◽

Kelvin Probe Force Microscopy ◽

Scanning Probe ◽

Kelvin Probe ◽

Probe Microscopy ◽

Force Microscopy ◽

Scanning Kelvin Probe

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The ORNL Lectures on Scanning Probe Microscopy, Part 2: The Force Dimension: Electronic and Ionic Transport Measurements via Kelvin Probe Force Microscopy

Microscopy Today ◽

10.1017/s1551929519001019 ◽

2019 ◽

Vol 27 (6) ◽

pp. 18-23

Author(s):

Sergei V. Kalinin

Keyword(s):

Scanning Probe Microscopy ◽

Ionic Transport ◽

Kelvin Probe Force Microscopy ◽

Scanning Probe ◽

Kelvin Probe ◽

Probe Microscopy ◽

Force Microscopy ◽

Transport Measurements ◽

Image Position

Abstract

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Present State of the Surface Potential Measurements by Kelvin Force Microscopy. Atomic-scale Potential Imaging by Ultrahigh Vacuum Scanning Probe Microscopy.

Hyomen Kagaku ◽

10.1380/jsssj.22.292 ◽

2001 ◽

Vol 22 (5) ◽

pp. 292-300

Author(s):

Shin-ichi KITAMURA ◽

Katsuyuki SUZUKI ◽

Masashi IWATSUKI

Keyword(s):

Surface Potential ◽

Present State ◽

Scanning Probe Microscopy ◽

Ultrahigh Vacuum ◽

Atomic Scale ◽

Scanning Probe ◽

Probe Microscopy ◽

Force Microscopy ◽

Surface Potential Measurements

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Surface potential measurements of AlGaN∕GaN high-electron-mobility transistors by Kelvin probe force microscopy

Applied Physics Letters ◽

10.1063/1.1835551 ◽

2004 ◽

Vol 85 (24) ◽

pp. 6028-6029 ◽

Cited By ~ 14

Author(s):

Kohei Nakagami ◽

Yutaka Ohno ◽

Shigeru Kishimoto ◽

Koichi Maezawa ◽

Takashi Mizutani

Keyword(s):

Surface Potential ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Kelvin Probe Force Microscopy ◽

High Electron ◽

Kelvin Probe ◽

High Electron Mobility ◽

Force Microscopy ◽

Electron Mobility Transistors ◽

Surface Potential Measurements

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Scanning Kelvin Probe Force Microscopy and Density Functional Theory Studies on the Surface Potential of the Intermetallics in AA7075-T6 Alloys

Journal of Materials Engineering and Performance ◽

10.1007/s11665-019-04160-6 ◽

2019 ◽

Vol 28 (7) ◽

pp. 4289-4301 ◽

Cited By ~ 2

Author(s):

Ni Li ◽

Chaofang Dong ◽

Xin Wei ◽

Chen Man ◽

Jizheng Yao ◽

...

Keyword(s):

Density Functional Theory ◽

Surface Potential ◽

Density Functional ◽

Kelvin Probe Force Microscopy ◽

Kelvin Probe ◽

Functional Theory ◽

Force Microscopy ◽

Scanning Kelvin Probe

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Surface potential measurements on Ni–(Al)GaN lateral Schottky junction using scanning Kelvin probe microscopy

Applied Physics Letters ◽

10.1063/1.2163073 ◽

2006 ◽

Vol 88 (2) ◽

pp. 022112 ◽

Cited By ~ 9

Author(s):

Chuanxin Lian ◽

Huili (Grace) Xing

Keyword(s):

Surface Potential ◽

Schottky Junction ◽

Kelvin Probe ◽

Probe Microscopy ◽

Kelvin Probe Microscopy ◽

Scanning Kelvin Probe ◽

Surface Potential Measurements

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Characterization of Carbide Particles in S-65 Beryllium by Scanning Kelvin Probe Force Microscopy

Journal of The Electrochemical Society ◽

10.1149/2.0271707jes ◽

2017 ◽

Vol 164 (7) ◽

pp. C342-C348 ◽

Cited By ~ 2

Author(s):

Christopher F. Mallinson ◽

Ann Harvey ◽

John F. Watts

Keyword(s):

Kelvin Probe Force Microscopy ◽

Kelvin Probe ◽

Force Microscopy ◽

Scanning Kelvin Probe ◽

Carbide Particles

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Surface potential measurements on GaN and AlGaN/GaN heterostructures by scanning Kelvin probe microscopy

Journal of Applied Physics ◽

10.1063/1.1371941 ◽

2001 ◽

Vol 90 (1) ◽

pp. 337-344 ◽

Cited By ~ 113

Author(s):

G. Koley ◽

M. G. Spencer

Keyword(s):

Surface Potential ◽

Kelvin Probe ◽

Probe Microscopy ◽

Kelvin Probe Microscopy ◽

Scanning Kelvin Probe ◽

Surface Potential Measurements

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Dual harmonic Kelvin probe force microscopy for surface potential measurements of ferroelectrics

Proceedings of ISAF-ECAPD-PFM 2012 ◽

10.1109/isaf.2012.6297845 ◽

2012 ◽

Cited By ~ 5

Author(s):

L. Collins ◽

J. I. Kilpatrick ◽

M. Bhaskaran ◽

S. Sriram ◽

S. A. L. Weber ◽

...

Keyword(s):

Surface Potential ◽

Kelvin Probe Force Microscopy ◽

Kelvin Probe ◽

Force Microscopy ◽

Surface Potential Measurements

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Scanning Kelvin Probe Force Microscopy and Magnetic Force Microscopy for Characterization of Duplex Stainless Steels

Journal of The Electrochemical Society ◽

10.1149/1.1572482 ◽

2003 ◽

Vol 150 (6) ◽

pp. B274 ◽

Cited By ~ 63

Author(s):

M. Femenia ◽

C. Canalias ◽

J. Pan ◽

C. Leygraf

Keyword(s):

Stainless Steels ◽

Magnetic Force Microscopy ◽

Magnetic Force ◽

Duplex Stainless Steels ◽

Kelvin Probe Force Microscopy ◽

Kelvin Probe ◽

Force Microscopy ◽

Scanning Kelvin Probe

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