Density functional study of the stability and electronic properties of TaxNy compounds used as copper diffusion barriers
2006 ◽
Vol 83
(11-12)
◽
pp. 2077-2081
◽
Keyword(s):
2013 ◽
Vol 652-654
◽
pp. 815-818
2002 ◽
Vol 117
(7)
◽
pp. 3120-3131
◽
2012 ◽
Vol 25
(3)
◽
pp. 261-268
◽
Keyword(s):
Keyword(s):
2009 ◽
Vol 131
(20)
◽
pp. 204313
◽
2008 ◽
Vol 7
(5-6)
◽
pp. 355-372