Finite element analysis of polysilicon based MEMS temperature-pressure sensor

2020 ◽  
Vol 27 ◽  
pp. 280-283
Author(s):  
Samridhi ◽  
Kulwant Singh ◽  
P.A. Alvi
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Pressure Sensor ◽  
Element Analysis

Sensitivity characterization of pressure sensor using ionic liquid by finite element analysis

2017 ◽  
Vol 2017.8 (0) ◽  
pp. PN-98
Author(s):  
Yusuke TSUJI ◽  
Yu NAKANO ◽  
Yoshikazu HIRAI ◽  
Ken-ichiro KAMEI ◽  
Toshiyuki TSUCHIYA ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Ionic Liquid ◽  
Pressure Sensor ◽  
Element Analysis

Study on a Fast Tool Servo (FTS) Driven by Piezoelectric Ceramic

2014 ◽  
Vol 635-637 ◽  
pp. 1335-1340 ◽  
Author(s):  
Ke Tian Li ◽  
Xin Chen ◽  
Xin Du Chen ◽  
Qiang Liu ◽  
Huan Wei Zhou
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Pressure Sensor ◽  
Piezoelectric Ceramic ◽  
Laser Interferometer ◽  
Driving Voltage ◽  
Fast Tool Servo ◽  
Element Analysis ◽  
Flexible Hinge ◽  
Stiffness Model

It is designed a Fast Tool Servo (FTS) device which based on piezoelectric ceramic and jointed by flexible hinge. The flexible hinge has been analyzed and optimized both by the theoretical calculation and finite element analysis; and it has been physically manufactured and tested by means of pressure sensor and laser interferometer. The stiffness model was established. The driving voltage and displacement relationship has been revealed. The results indicate that this FTS system can reach a travel range for 60μm,the frequency response precedes 150Hz within 39μm travel range.

Development of Biocompatible MEMS Wireless Capacitive Pressure Sensor

2005 ◽  
Vol 2 (4) ◽  
pp. 287-296
Author(s):  
Shankaran Janardhanan ◽  
Joan. Z. Delalic ◽  
Jeffrey Catchmark ◽  
Dharanipal Saini
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Resonant Frequency ◽  
Pressure Sensor ◽  
Impedance Matching ◽  
Pressure Sensors ◽  
Important Variable ◽  
Bladder Pressure ◽  
Capacitive Pressure Sensor ◽  
Element Analysis

The objective of this research was to develop a wireless pressure sensor useful for monitoring bladder pressure. The wireless sensor consists of an active capacitive element and an inductor coil. The changes in pressure are related to the changes in the resonant frequency of the internal sensor. The existing pressure sensors have inductors formed on both sides of the substrate. The changes in internal capacitance of these sensors are related to the changes in pressure by impedance matching of the internal LC circuit. The deviation in bladder pressure is an important variable in evaluating the diseased state of the bladder. The inductor designed for this application is a spirally wound inductor fabricated adjacent to the capacitor. The external sensing uses equivalent changes in internal LC. The resonant frequency of the internal sensor is defined by the deformation of the plate, causing the plate to touch the dielectric on the fixed capacitive plate, which is reflected as changes in capacitance(C). The deformation of the plate has been modeled using Finite Element Analysis. The finite element analysis optimizes the dimensions of the design. Remote sensing is achieved through inductive coupling and the changes in pressure are determined. The device is tested for pressures ranging from 0–150 mmHg, bladder pressure. The RF Telemetry system has been modeled using Sonnet. The frequency range is between 100–670 MHz which is in compliance to that specified by Federal Communications Commission (FCC) regulations.

Sign in / Sign up

Export Citation Format

Share Document