Controlled fabrication of nano-scale double barrier magnetic tunnel junctions using focused ion beam milling method

2006 ◽  
Vol 303 (2) ◽  
pp. e208-e211 ◽  
Author(s):  
H.X. Wei ◽  
T.X. Wang ◽  
Z.M. Zeng ◽  
X.Q. Zhang ◽  
J. Zhao ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Tunnel Junctions ◽  
Ion Beam ◽  
Magnetic Tunnel Junctions ◽  
Double Barrier ◽  
Nano Scale ◽  
Milling Method ◽  
Focused Ion Beam Milling

Characterisation of nanoporous materials using Focused Ion Beam milling method

2012 ◽  
Author(s):  
Sahand Chitsaz Charandabi ◽  
Aydin Sabouri ◽  
Hossein Ostadi ◽  
Carl J. Anthony ◽  
Philip D. Prewett
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Nanoporous Materials ◽  
Milling Method ◽  
Focused Ion Beam Milling

Focused Ion Beam Milling of Crystalline Diamonds

2011 ◽  
Vol 1282 ◽  
Author(s):  
Rustin Golnabi ◽  
Won I. Lee ◽  
Deok-Yang Kim ◽  
Glen R. Kowach
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Milling Process ◽  
Pattern Design ◽  
Wide Range ◽  
Milling Method ◽  
Micrometer Size ◽  
New Applications ◽  
Milling Yield ◽  
Focused Ion Beam Milling

ABSTRACTRecently, a wide range of new applications of diamond materials such as spintronics, field emission, and bio-sensing have been proposed. These applications often require the precise patterning of diamonds, which is not trivial because diamonds are the hardest materials known in nature. Among various patterning techniques, the focused ion beam milling method has been proven to provide flexibility as well as high resolution in the pattern design. In this study, a focused beam of 30 kV Ga+ ions was utilized to create sub-micrometer size patterns out of crystalline diamonds. The sputtering rate, re-deposition, and surface roughening of diamond structure have been closely monitored with various milling parameters during the milling process. Our study revealed a low milling yield of 0.02 μm3/nC, high Ga content re-deposition, and the formation of sub-micron scale terracing on the sidewall of patterned diamonds.

A Simple Fabrication Process using Focused Ion Beam for Deep Submicron Magnetic Tunnel Junctions

2004 ◽  
Vol 43 (11A) ◽  
pp. 7489-7490 ◽  
Author(s):  
Daisuke Watanabe ◽  
Hitoshi Kubota ◽  
Yasuo Ando ◽  
Terunobu Miyazaki
Keyword(s):  
Focused Ion Beam ◽  
Tunnel Junctions ◽  
Ion Beam ◽  
Magnetic Tunnel Junctions ◽  
Deep Submicron ◽  
Fabrication Process

scholarly journals Fabrication of Small Magnetic Tunnel Junctions Using a Focused Ion Beam

2004 ◽  
Vol 28 (4) ◽  
pp. 569-572 ◽  
Author(s):  
D. Watanabe ◽  
H. Kubota ◽  
Y. Ando ◽  
T. Miyazaki
Keyword(s):  
Focused Ion Beam ◽  
Tunnel Junctions ◽  
Ion Beam ◽  
Magnetic Tunnel Junctions

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling
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