Development and performance evaluation of an ultra precision ELID grinding machine

2007 ◽  
Vol 192-193 ◽  
pp. 287-291 ◽  
Author(s):  
T. Saleh ◽  
M. Sazedur Rahman ◽  
H.S. Lim ◽  
M. Rahman
Keyword(s):  
Performance Evaluation ◽  
Elid Grinding ◽  
Ultra Precision ◽  
And Performance ◽  
Grinding Machine

scholarly journals Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Materials ◽  
2020 ◽  
Vol 13 (18) ◽  
pp. 3976
Author(s):  
Bo Zhao ◽  
Ri Fang ◽  
Weijia Shi
Keyword(s):  
Performance Evaluation ◽  
Simulation Model ◽  
Driving Force ◽  
Solid Mechanics ◽  
Semiconductor Industry ◽  
Coupling Model ◽  
Field Coupling ◽  
Motor Design ◽  
Ultra Precision ◽  
And Performance

Ultra-precision piezoelectric inchworm motor (PIM) is widely used in the optical equipment, microelectronics semiconductor industry and precision manufacturing for motion and positioning, but the multi-physics field simulation model for estimating PIM performance and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results showed that the motion gesture of the inchworm motor was well consistent with that of the actual motor product. The driving force from the simulation was close to that of the actual product, and the maximum error was 2.8%. As for the PIM travel, there was a maximum travel error of 0.6 μm between the simulation and official data. The performance parameters of the piezoelectric materials under certain specifications can be simulated by the multi-physics field coupling model. Therefore, the multi-physics field coupling simulation model is suitable for PIM performance evaluation and assisting motor development.

The Development and Research of the Special ELID Grinding Machine

2013 ◽  
Vol 816-817 ◽  
pp. 298-302
Author(s):  
Jia Liang Guan ◽  
Zhi Wei Wang ◽  
Li Li Zhu ◽  
Zhi De Chen ◽  
Wen Chang Wang
Keyword(s):  
Experimental Results ◽  
Structure Characteristics ◽  
Machining Precision ◽  
Elid Grinding ◽  
Ultra Precision ◽  
Grinding Machine

ELID grinding technology applied to difficult-to-machine materials’ precision and ultra-precision processing has obtained good results. Based on the existing experimental results of ELID grinding, according to the structure characteristics of the existing grinding machine, we designed and developed a special ELID grinding machine in order to greatly improve the machining precision and automation degree of the existing grinding machine and achieve precision and ultra-precision processing of difficult-to-machine materials.

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