Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting

2019 ◽  
Vol 45 ◽  
pp. 176-187 ◽  
Author(s):  
Zhanwen Sun ◽  
Suet To ◽  
KM Yu
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Fly Cutting ◽  
Ductile Machining ◽  
Ultra Precision ◽  
Micro Structures

Nanoindentation Characterization of Single-Crystal Silicon With Oxide Film

2021 ◽  
Author(s):  
Lianmin Yin ◽  
Yifan Dai ◽  
Hao Hu
Keyword(s):  
Mechanical Properties ◽  
Plastic Deformation ◽  
Oxide Film ◽  
Single Crystal ◽  
Deformation Zone ◽  
Single Crystal Silicon ◽  
Plastic Deformation Zone ◽  
Crystal Silicon ◽  
Ultra Precision

Abstract In order to obtain ultra-smooth surfaces of single-crystal silicon in ultra-precision machining, an accurate study of the deformation mechanism, mechanical properties, and the effect of oxide film under load is required. The mechanical properties of single-crystal silicon and the phase transition after nanoindentation experiments are investigated by nanoindentation and Raman spectroscopy, respectively. It is found that pop-in events appear in the theoretical elastic domain of single-crystal silicon due to the presence of oxide films, which directly leads the single crystal silicon from the elastic deformation zone into the plastic deformation zone. In addition, the mechanical properties of single-crystal silicon are more accurately measured after it has entered the full plastic deformation.

Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

Wear ◽  
2003 ◽  
Vol 255 (7-12) ◽  
pp. 1380-1387 ◽  
Author(s):  
Jiwang Yan ◽  
Katsuo Syoji ◽  
Jun’ichi Tamaki
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Diamond Tools ◽  
Ultra Precision
Sign in / Sign up

Export Citation Format

Share Document