Microstructure, wettability, optical and electrical properties of HfO2 thin films: Effect of oxygen partial pressure

2016 ◽  
Vol 662 ◽  
pp. 339-347 ◽  
Author(s):  
J. Gao ◽  
G. He ◽  
B. Deng ◽  
D.Q. Xiao ◽  
M. Liu ◽  
...  
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