X-ray photoelectron spectroscopy of metal free porphyrazine, phthalocyanine and naphthalocyanine: density functional calculations

2005 ◽  
Vol 142 (2) ◽  
pp. 145-149 ◽  
Author(s):  
Xianxi Zhang ◽  
Jianzhuang Jiang
2013 ◽  
Vol 138 (24) ◽  
pp. 244312 ◽  
Author(s):  
Xiang-Yu Kong ◽  
Xiao-Jiao Deng ◽  
Hong-Guang Xu ◽  
Zheng Yang ◽  
Xi-Ling Xu ◽  
...  

2021 ◽  
Vol 314 ◽  
pp. 302-306
Author(s):  
Quoc Toan Le ◽  
E. Kesters ◽  
M. Doms ◽  
Efrain Altamirano Sánchez

Different types of ALD Ru films, including as-deposited, annealed Ru, without and with a subsequent CMP step, were used for wet etching study. With respect to the as-deposited Ru, the etching rate of the annealed Ru film in metal-free chemical mixtures (pH = 7-9) was found to decrease substantially. X-ray photoelectron spectroscopy characterization indicated that this behavior could be explained by the presence of the formation of RuOx (x = 2,3) caused by the anneal. A short CMP step applied to the annealed Ru wafer removed the surface RuOx, at least partially, resulting in a significant increase of the etching rate. The change in surface roughness was quantified using atomic force microscopy.


2015 ◽  
Vol 17 (46) ◽  
pp. 31011-31022 ◽  
Author(s):  
Xi-Ling Xu ◽  
Xiao-Jiao Deng ◽  
Hong-Guang Xu ◽  
Wei-Jun Zheng

The vertical detachment energies of both CnS− and CnS2− (n = 2–7) clusters exhibit a strong odd–even alternation with an increasing number of carbon atoms.


2018 ◽  
Vol 20 (31) ◽  
pp. 20622-20628 ◽  
Author(s):  
Xi-Ling Xu ◽  
Bin Yang ◽  
Zhi-You Wei ◽  
Guo-Jin Cao ◽  
Hong-Guang Xu ◽  
...  

The structures of Cu3O3− and Cu3O4− were determined by combination of anion photoelectron spectroscopy and density functional calculations. The Cu–Cu interactions in Cu3O3− and Cu3O4− are weak.


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