In situ photoelectron spectroscopy analysis of tetrahedral amorphous carbon films

2004 ◽  
Vol 136 (3) ◽  
pp. 239-245 ◽  
Author(s):  
P Reinke ◽  
M.G Garnier ◽  
P Oelhafen
Keyword(s):  
Amorphous Carbon ◽  
Photoelectron Spectroscopy ◽  
Carbon Films ◽  
Spectroscopy Analysis ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

THE DETERMINATION OF SP3 FRACTION IN TETRAHEDRAL AMORPHOUS CARBON FILMS BY RAMAN AND X-RAY PHOTOELECTRON SPECTROSCOPY

2002 ◽  
Vol 16 (28n29) ◽  
pp. 4413-4417 ◽  
Author(s):  
DIHU CHEN ◽  
G. Y. JING ◽  
AIXIANG WEI
Keyword(s):  
Amorphous Carbon ◽  
Photoelectron Spectroscopy ◽  
Plasma Deposition ◽  
Carbon Films ◽  
Gaussian Peak ◽  
Xps Spectra ◽  
Raman Analysis ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

Tetrahedral amorphous carbon films have been prepared by magnetic filtered plasma deposition system. The samples were deposited with negative bias voltage V b range from +20 V to -95 V. The relative fraction of sp 3-bonded carbon in these films was qualitatively and quantitatively estimated by a fitting of the Raman and XPS spectra, respectively. Raman results show that the sp 3 fraction of the films deposited in the range from -10 V to -50 V was estimated to be more than 80%. The C 1s spectra were consistently decomposed into the two gaussian components, one is at 284.4±0.1 eV corresponding to sp 2-hybridized bonds, and another is at 285.2±0.1 eV corresponding to sp 3-hybridized bond. The sp 3 content can be quantitatively calculated from the integrated area of the respective gaussian peak divided by the total area of the spectra. The comparison of XPS with Raman analysis, the trend of qualitative variation of sp 3 content with V b is in agreement. We concluded that XPS analysis is a useful method for quantitatively calculating sp 3 content in hydrogen-free tetrahedral amorphous carbon films.

Ultraviolet and visible Raman studies of nitrogenated tetrahedral amorphous carbon films

2000 ◽  
Vol 366 (1-2) ◽  
pp. 169-174 ◽  
Author(s):  
J.R. Shi ◽  
X. Shi ◽  
Z. Sun ◽  
E. Liu ◽  
B.K. Tay ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

scholarly journals Surface modification and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic N ion

2011 ◽  
Vol 60 (6) ◽  
pp. 066804
Author(s):  
Han Liang ◽  
Chen Xian ◽  
Yang Li ◽  
Wang Yan-Wu ◽  
Wang Xiao-Yan ◽  
...  
Keyword(s):  
Surface Modification ◽  
Friction Coefficient ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

In-situ thermal stability analysis of amorphous carbon films with different sp3 content

Carbon ◽  
2018 ◽  
Vol 130 ◽  
pp. 401-409 ◽  
Author(s):  
Mehdi Rouhani ◽  
Franklin Chau-Nan Hong ◽  
Yeau-Ren Jeng
Keyword(s):  
Thermal Stability ◽  
Stability Analysis ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films
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