Resonance surface X-ray scattering technique to determine the structure of electrodeposited Pt ultrathin layers on Au(111) surface

2010 ◽  
Vol 55 (27) ◽  
pp. 8302-8306 ◽  
Author(s):  
Toshihiro Kondo ◽  
Masayo Shibata ◽  
Naoko Hayashi ◽  
Hitoshi Fukumitsu ◽  
Takuya Masuda ◽  
...  
Keyword(s):  
X Ray ◽  
X Ray Scattering ◽  
Ultrathin Layers ◽  
Scattering Technique ◽  
Resonance Surface ◽  
Ray Scattering

A New X-Ray Scattering Method for Determining Pore-Size Distribution in Low-k Thin Films

2001 ◽  
Vol 714 ◽  
Author(s):  
Kazuhiko Omote ◽  
Shigeru Kawamura
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Gas Adsorption ◽  
Size Distributions ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Size Distributions ◽  
Scattering Technique ◽  
Ray Scattering

ABSTRACTWe have successively developed a new x-ray scattering technique for a non-destructive determination of pore-size distributions in porous low-κ thin films formed on thick substrates. The pore size distribution in a film is derived from x-ray diffuse scattering data, which are measured using offset θ/2θ scans to avoid strong specular reflections from the film surface and its substrate. Γ-distribution mode for the pores in the film is used in the calculation. The average diameter and the dispersion parameter of the Γ-distribution function are varied and refined by computer so that the calculated scattering pattern best matches to the experimental pattern. The technique has been used to analyze porous methyl silsesquioxane (MSQ) films. The pore size distributions determined by the x-ray scattering technique agree with that of the commonly used gas adsorption technique. The x-ray technique has been also used successfully determine small pores less than one nanometer in diameter, which is well below the lowest limit of the gas adsorption technique.

scholarly journals Fine Structure Analysis of Ramie Fibres by Small Angle X-Ray Scattering Technique

1997 ◽  
Vol 29 (12) ◽  
pp. 1007-1011 ◽  
Author(s):  
T Misra ◽  
J Shukla ◽  
Md N Khan ◽  
D K Bisoyi ◽  
T Patel
Keyword(s):  
Fine Structure ◽  
Structure Analysis ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Fine Structure Analysis ◽  
Scattering Technique ◽  
Ray Scattering

scholarly journals In situ structural study on underpotential deposition of Ag on Au(111) electrode using surface X-ray scattering technique

2002 ◽  
Vol 532 (1-2) ◽  
pp. 201-205 ◽  
Author(s):  
Toshihiro Kondo ◽  
Jun Morita ◽  
Masayuki Okamura ◽  
Toshiya Saito ◽  
Kohei Uosaki
Keyword(s):  
Structural Study ◽  
Underpotential Deposition ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Technique ◽  
Ray Scattering
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