Self-consistent charge-up simulation for the microscopic feature of SiO2 layer in rf capacitive discharge

2015 ◽  
Vol 15 (11) ◽  
pp. 1463-1471 ◽  
Author(s):  
S.H. Lee ◽  
J.K. Lee ◽  
S.W. Jung ◽  
D.W. Kim ◽  
S.J. You
Keyword(s):  
Sio2 Layer ◽  
Capacitive Discharge ◽  
Self Consistent ◽  
Microscopic Feature

The evolution of the Kuiper belt during the formation of the outer planets

1999 ◽  
Vol 173 ◽  
pp. 37-44
Author(s):  
M.D. Melita ◽  
A. Brunini
Keyword(s):  
Kuiper Belt ◽  
Outer Planets ◽  
Self Consistent ◽  
Planetary Bodies ◽  
Mass Depletion

AbstractA self-consistent study of the formation of planetary bodies beyond the orbit of Saturn and the evolution of Kuiper disks is carried out by means of an N-body code where accretion and gravitational encounters are considered. This investigation is focused on the aggregation of massive bodies in the outer planetary region and on the consequences of such process in the corresponding cometary belt. We study the link between the bombardment of massive bodies and mass depletion and eccentricity excitation.

The reaction of amorphous Ni-Nb films with Si in the presence of a native SiO2 layer

1990 ◽  
Vol 48 (4) ◽  
pp. 664-665
Author(s):  
N. Rozhanski ◽  
A. Barg
Keyword(s):  
High Temperature ◽  
Crystallization Temperature ◽  
Diffusion Barriers ◽  
Sio2 Layer ◽  
Si Substrate ◽  
Cross Sectional ◽  
Plan View ◽  
Temperature Range ◽  
Sputter Deposited

Amorphous Ni-Nb alloys are of potential interest as diffusion barriers for high temperature metallization for VLSI. In the present work amorphous Ni-Nb films were sputter deposited on Si(100) and their interaction with a substrate was studied in the temperature range (200-700)°C. The crystallization of films was observed on the plan-view specimens heated in-situ in Philips-400ST microscope. Cross-sectional objects were prepared to study the structure of interfaces.The crystallization temperature of Ni5 0 Ni5 0 and Ni8 0 Nb2 0 films was found to be equal to 675°C and 525°C correspondingly. The crystallization of Ni5 0 Ni5 0 films is followed by the formation of Ni6Nb7 and Ni3Nb nucleus. Ni8 0Nb2 0 films crystallise with the formation of Ni and Ni3Nb crystals. No interaction of both films with Si substrate was observed on plan-view specimens up to 700°C, that is due to the barrier action of the native SiO2 layer.

THEORY AND SELF-CONSISTENT MODEL OF DUST-DRIVEN WINDS

2002 ◽  
Vol 5 ◽  
pp. 65-65
Author(s):  
S. Liberatore ◽  
J.-P.J. Lafon ◽  
N. Berruyer
Keyword(s):  
Consistent Model ◽  
Self Consistent

Étude de la molécule de méthane par la méthode du champ self-consistent

1959 ◽  
Vol 56 ◽  
pp. 250-256 ◽  
Author(s):  
Sylvette Besnainou ◽  
Monique Roux
Keyword(s):  
Self Consistent
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