Laser interference lithography using spray/spin photoresist development method for consistent periodic nanostructures

2014 ◽  
Vol 14 (2) ◽  
pp. 209-214 ◽  
Author(s):  
Hyungmo Kim ◽  
Dasook Kim ◽  
Chan Lee ◽  
Joonwon Kim
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Periodic Nanostructures ◽  
Development Method

scholarly journals The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography

Nanomaterials ◽  
2019 ◽  
Vol 9 (1) ◽  
pp. 73 ◽  
Author(s):  
Jun Wu ◽  
Zhaoxin Geng ◽  
Yiyang Xie ◽  
Zhiyuan Fan ◽  
Yue Su ◽  
...  
Keyword(s):  
Indium Tin Oxide ◽  
Splitting Method ◽  
Vertical Direction ◽  
Interference Lithography ◽  
Wearable Electronics ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Periodic Nanostructures ◽  
Ito Glass

We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.

Fabrication of large-area periodic nanostructures using two-mirror laser interference lithography

2013 ◽  
Vol 9 (6) ◽  
pp. 879-882 ◽  
Author(s):  
Jongseok Kim ◽  
Il Gyu Jeong ◽  
Sang Ho Lee ◽  
Kyung Tae Kang ◽  
Sung Ho Lee
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Periodic Nanostructures

Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

2021 ◽  
pp. 2150459
Author(s):  
Xiangxian Wang ◽  
Tianxu Jia ◽  
Jiankai Zhu ◽  
Yingwen Su ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Manufacturing Industry ◽  
Structural Parameters ◽  
Interference Lithography ◽  
Polarization Angle ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Structure ◽  
Periodic Patterns ◽  
Beam Laser ◽  
Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

scholarly journals UV-Laser Interference Lithography for Local Functionalization of Plasmonic Nanostructures with Responsive Hydrogel

2020 ◽  
Vol 124 (5) ◽  
pp. 3297-3305 ◽  
Author(s):  
Nestor Gisbert Quilis ◽  
Simone Hageneder ◽  
Stefan Fossati ◽  
Simone K. Auer ◽  
Priyamvada Venugopalan ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Plasmonic Nanostructures ◽  
Laser Interference Lithography ◽  
Uv Laser ◽  
Laser Interference

High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

2009 ◽  
Vol 255 (10) ◽  
pp. 5537-5541 ◽  
Author(s):  
M. Ellman ◽  
A. Rodríguez ◽  
N. Pérez ◽  
M. Echeverria ◽  
Y.K. Verevkin ◽  
...  
Keyword(s):  
High Power ◽  
Laser Fluence ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
High Power Laser ◽  
Laser Interference ◽  
Power Laser ◽  
Lithography Process

Formation of 300 nm period pore arrays by laser interference lithography and electrochemical etching

2015 ◽  
Vol 106 (5) ◽  
pp. 053107 ◽  
Author(s):  
J. Liu ◽  
P. Kleimann ◽  
G. Laffite ◽  
C. Jamois ◽  
R. Orobtchouk
Keyword(s):  
Electrochemical Etching ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference
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