Enhancement of electrical properties in Al-doped ZnO films by tuning dc bias voltage during radio frequency magnetron sputtering

2012 ◽  
Vol 12 ◽  
pp. S71-S75 ◽  
Author(s):  
Y.S. No ◽  
D.H. Park ◽  
T.W. Kim ◽  
J.W. Choi ◽  
B. Angadi ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Bias Voltage ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Dc Bias ◽  
Doped Zno

Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering

2011 ◽  
Vol 11 (1) ◽  
pp. S185-S190 ◽  
Author(s):  
Hung-Peng Chang ◽  
Fang-Hsing Wang ◽  
Jen-Chi Chao ◽  
Chia-Cheng Huang ◽  
Han-Wen Liu
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno

Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽  
2019 ◽  
Vol 194 ◽  
pp. 471-477 ◽  
Author(s):  
Yanfeng Wang ◽  
Jianmin Song ◽  
Jie Zhang ◽  
Guoxi Zheng ◽  
Xiaochen Duan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno ◽  
Co Doped
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