A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al2O3 layers atomic layer deposition

2012 ◽  
Vol 12 ◽  
pp. S19-S23 ◽  
Author(s):  
Dong-won Choi ◽  
Sang-Jun Kim ◽  
Ju Ho Lee ◽  
Kwun-Bum Chung ◽  
Jin-Seong Park
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Polymer Substrate ◽  
Layer Deposition ◽  
Thin Film Encapsulation

Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature

2013 ◽  
Vol 117 (39) ◽  
pp. 20308-20312 ◽  
Author(s):  
Yong-Qiang Yang ◽  
Yu Duan ◽  
Ping Chen ◽  
Feng-Bo Sun ◽  
Ya-Hui Duan ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Encapsulation

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Flexible thin film pH sensor based on low-temperature atomic layer deposition

2017 ◽  
Vol 11 (7) ◽  
pp. 1700123 ◽  
Author(s):  
Markus H. Jakob ◽  
Sebastian Gutsch ◽  
Claire Chatelle ◽  
Abinaya Krishnaraja ◽  
John Fahlteich ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Ph Sensor ◽  
Atomic Layer ◽  
Layer Deposition
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