Electron interactions with plasma processing gases – Progress of magnetized electron-impact total cross section measurement system(ELECS-1)

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pp. S192-S194
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Dae Chul Kim ◽  
Mi-Young Song ◽  
Yonghyun Kim ◽  
Young-Woo Kim ◽  
Young Rock Choi ◽  
...  
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Author(s):  
S. R. Amendolia ◽  
G. Bellettini ◽  
P. L. Braccini ◽  
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Vol 22 (Part 1, No. 10) ◽  
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