Electron interactions with plasma processing gases – Progress of magnetized electron-impact total cross section measurement system(ELECS-1)
1981 ◽
Vol 14
(3)
◽
pp. L97-L100
◽
1984 ◽
Vol 11
(7)
◽
pp. 315-320
◽
1983 ◽
Vol 22
(Part 1, No. 10)
◽
pp. 1606-1612
◽
Keyword(s):
1985 ◽
Vol 12
(4)
◽
pp. 171-174
◽
1978 ◽
Vol 65
(2)
◽
pp. 347-353
◽