scholarly journals Layered Al2O3-SiO2 and Al2O3-Ta2O5 thin-film composites for high dielectric strength, deposited by pulsed direct current and radio frequency magnetron sputtering

2019 ◽  
Vol 492 ◽  
pp. 328-336 ◽  
Author(s):  
Benjamin V.T. Hanby ◽  
Bryan W. Stuart ◽  
Miquel Gimeno-Fabra ◽  
Jonathan Moffat ◽  
Chris Gerada ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Direct Current ◽  
Dielectric Strength ◽  
Radio Frequency Magnetron Sputtering ◽  
High Dielectric ◽  
Pulsed Direct Current ◽  
Thin Film Composites ◽  
Film Composites

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering
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