On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

2018 ◽  
Vol 427 ◽  
pp. 260-266 ◽  
Author(s):  
A. Brady-Boyd ◽  
R. O’Connor ◽  
S. Armini ◽  
V. Selvaraju ◽  
G. Hughes ◽  
...  
Keyword(s):  
Diffusion Barrier ◽  
Self Assembled Monolayers ◽  
Copper Diffusion ◽  
Barrier Layers ◽  
Assembled Monolayers ◽  
Self Assembled ◽  
Seed Layers

Enhancement of seeding for electroless Cu plating of metallic barrier layers by using alkyl self-assembled monolayers

2017 ◽  
Vol 405 ◽  
pp. 350-358 ◽  
Author(s):  
Sung-Te Chen ◽  
Yu-Cheng Chung ◽  
Jau-Shiung Fang ◽  
Yi-Lung Cheng ◽  
Giin-Shan Chen
Keyword(s):  
Self Assembled Monolayers ◽  
Barrier Layers ◽  
Assembled Monolayers ◽  
Self Assembled

Enhancement of Seeding and Electroless Cu Plating on TaN Barrier Layers: The Role of Plasma Functionalized Self-Assembled Monolayers

2016 ◽  
Vol 163 (9) ◽  
pp. D463-D468 ◽  
Author(s):  
Giin-Shan Chen ◽  
Ding-Ye Wu ◽  
Sung-Te Chen ◽  
Yi-Lung Cheng ◽  
Jau-Shiung Fang ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
Barrier Layers ◽  
Assembled Monolayers ◽  
Self Assembled

Bottom-Up Engineering of Subnanometer Copper Diffusion Barriers Using NH2-Derived Self-Assembled Monolayers

2010 ◽  
Vol 20 (7) ◽  
pp. 1125-1131 ◽  
Author(s):  
Arantxa Maestre Caro ◽  
Silvia Armini ◽  
Olivier Richard ◽  
Guido Maes ◽  
Gustaaf Borghs ◽  
...  
Keyword(s):  
Diffusion Barriers ◽  
Self Assembled Monolayers ◽  
Bottom Up ◽  
Copper Diffusion ◽  
Assembled Monolayers ◽  
Self Assembled

Vapor Phase Self-Assembled Monolayers for CMOS BEOL Barrier Layers

2016 ◽  
Vol 72 (4) ◽  
pp. 153-156 ◽  
Author(s):  
T. R. Naik ◽  
M. Ravikanth ◽  
V. R. Rao
Keyword(s):  
Vapor Phase ◽  
Self Assembled Monolayers ◽  
Barrier Layers ◽  
Assembled Monolayers ◽  
Self Assembled

Electrochemical behavior of self-assembled monolayers based on functionalized oligothiophenes

1998 ◽  
Vol 95 (6) ◽  
pp. 1339-1342 ◽  
Author(s):  
R. Michalitsch ◽  
A. El Kassmi ◽  
P. Lang ◽  
A. Yassar ◽  
F. Garnier
Keyword(s):  
Electrochemical Behavior ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Imaging of patterned self-assembled monolayers by scanning photoelectron microscopy

2003 ◽  
Vol 104 ◽  
pp. 459-462 ◽  
Author(s):  
R. Klauser ◽  
M. Zharnikov ◽  
I.-H. Hong ◽  
S.-C. Wang ◽  
A. Gölzhäuser ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Scanning Photoelectron Microscopy ◽  
Self Assembled
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