scholarly journals Control of interfacial layer growth during deposition of high-κ oxide thin films in reactive RF-sputtering system

2017 ◽  
Vol 423 ◽  
pp. 957-960
Author(s):  
Abhishek Rakshit ◽  
Arijit Bose ◽  
Debaleen Biswas ◽  
Madhusudan Roy ◽  
Radhaballabh Bhar ◽  
...  
Keyword(s):  
Thin Films ◽  
Interfacial Layer ◽  
Rf Sputtering ◽  
Layer Growth ◽  
Oxide Thin Films ◽  
Sputtering System

ChemInform Abstract: Electrochromic Lithium Nickel Oxide Thin Films by RF-Sputtering from a LiNiO2 Target.

ChemInform ◽  
2010 ◽  
Vol 30 (32) ◽  
pp. no-no
Author(s):  
F. Michalak ◽  
K. von Rottkay ◽  
T. Richardson ◽  
J. Slack ◽  
M. Rubin
Keyword(s):  
Thin Films ◽  
Nickel Oxide ◽  
Rf Sputtering ◽  
Oxide Thin Films ◽  
Lithium Nickel Oxide ◽  
Nickel Oxide Thin Films

scholarly journals Electrochromic lithium nickel oxide thin films by RF-sputtering from a LiNiO2 target

1999 ◽  
Vol 44 (18) ◽  
pp. 3085-3092 ◽  
Author(s):  
F Michalak ◽  
K von Rottkay ◽  
T Richardson ◽  
J Slack ◽  
M Rubin
Keyword(s):  
Thin Films ◽  
Nickel Oxide ◽  
Rf Sputtering ◽  
Oxide Thin Films ◽  
Lithium Nickel Oxide ◽  
Nickel Oxide Thin Films

Characterization of Ag oxide thin films prepared by reactive RF sputtering

Vacuum ◽  
2004 ◽  
Vol 76 (1) ◽  
pp. 1-6 ◽  
Author(s):  
Yoshio Abe ◽  
Tomoaki Hasegawa ◽  
Midori Kawamura ◽  
Katsutaka Sasaki
Keyword(s):  
Thin Films ◽  
Rf Sputtering ◽  
Oxide Thin Films
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