The role of Ar plasma treatment in generating oxygen vacancies in indium tin oxide thin films prepared by the sol-gel process

2017 ◽  
Vol 405 ◽  
pp. 344-349 ◽  
Author(s):  
Deuk-Kyu Hwang ◽  
Mrinmoy Misra ◽  
Ye-Eun Lee ◽  
Sung-Doo Baek ◽  
Jae-Min Myoung ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Vacancies ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Sol Gel Process ◽  
Ar Plasma

scholarly journals Enhancement of Electrical Properties of Sol–Gel Indium–Tin–Oxide Films by Microwave Irradiation and Plasma Treatment

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1167
Author(s):  
Sung-Hun Kim ◽  
Won-Ju Cho
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Microwave Irradiation ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Sol Gel ◽  
X Ray ◽  
Ito Thin Films ◽  
Ar Plasma

We proposed the enhancement of the electrical properties of solution-processed indium–tin–oxide (ITO) thin films through microwave irradiation (MWI) and argon (Ar) gas plasma treatment. A cost- and time-effective heat treatment through MWI was applied as a post-deposition annealing (PDA) process to spin-coated ITO thin films. Subsequently, the sheet resistance of MWI ITO thin films was evaluated before and after plasma treatment. The change in the sheet resistance demonstrated that MWI PDA and Ar plasma treatment significantly improved the electrical properties of the ITO thin films. Furthermore, X-ray photoelectron spectroscopy and X-ray diffraction analyses showed that the electrical properties of the ITO thin films were enhanced by the increase in oxygen vacancies due to the ion bombardment effect of high-energy plasma ions during Ar plasma treatment. Changes in the band gap structure of the ITO thin film due to the ion bombardment effect were also analyzed. The combination of MWI PDA and Ar plasma treatment presents new possibilities for improving the high-conductivity sol–gel ITO electrode.

Corrigendum to ‘Eco-friendly method of fabricating indium-tin-oxide thin films using pure aqueous sol-gel’ [Ceram. Int. 44 (2018) 2927–2933]

2020 ◽  
Vol 46 (6) ◽  
pp. 8495
Author(s):  
Mrinmoy Misra ◽  
Deuk-Kyu Hwang ◽  
Yoon Cheol Kim ◽  
Jae-Min Myoung ◽  
Tae Il Lee
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Sol Gel ◽  
Oxide Thin Films

Study of Nitrogen Plasma Treatment on Indium Tin Oxide Thin Films

2020 ◽  
Vol 70 (1) ◽  
pp. 103-106
Author(s):  
Ji-Won JANG ◽  
Hyeok JEE ◽  
Hye-Won SEO*
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Nitrogen Plasma ◽  
Oxide Thin Films
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