Structural characterization of the interface structure of amorphous silicon thin films after post-deposition argon or hydrogen plasma treatment

2017 ◽  
Vol 403 ◽  
pp. 200-205 ◽  
Author(s):  
Alex Neumüller ◽  
Oleg Sergeev ◽  
Martin Vehse ◽  
Carsten Agert
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Amorphous Silicon ◽  
Structural Characterization ◽  
Hydrogen Plasma ◽  
Interface Structure ◽  
Silicon Thin Films ◽  
Post Deposition

Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films

1999 ◽  
Vol 85 (11) ◽  
pp. 7914-7918 ◽  
Author(s):  
D. Toet ◽  
P. M. Smith ◽  
T. W. Sigmon ◽  
T. Takehara ◽  
C. C. Tsai ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Structural Characterization ◽  
Hydrogenated Amorphous Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Films ◽  
Hydrogenated Amorphous

In-guide pump and probe characterization of photoinduced absorption in hydrogenated amorphous silicon thin films

2006 ◽  
Vol 100 (3) ◽  
pp. 033104 ◽  
Author(s):  
Francesco Giuseppe Della Corte ◽  
Massimo Gagliardi ◽  
Maria Arcangela Nigro ◽  
Caterina Summonte
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Photoinduced Absorption ◽  
Silicon Thin Films ◽  
Pump And Probe ◽  
Hydrogenated Amorphous

Ex situellipsometry characterization of excimer laser annealed amorphous silicon thin films grown by low pressure chemical vapor deposition

1997 ◽  
Vol 71 (3) ◽  
pp. 359-361 ◽  
Author(s):  
Chau-Hong Kuo ◽  
In-Cha Hsieh ◽  
Dieter K. Schroder ◽  
George N. Maracas ◽  
Sheau Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silicon Thin Films ◽  
Pressure Chemical
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