Experiment and simulation study of laser dicing silicon with water-jet

2016 ◽  
Vol 387 ◽  
pp. 491-496 ◽  
Author(s):  
Jiading Bao ◽  
Yuhong Long ◽  
Youqun Tong ◽  
Xiaoqing Yang ◽  
Bin Zhang ◽  
...  
2018 ◽  
Vol 565 ◽  
pp. 194-202 ◽  
Author(s):  
Chunfeng Song ◽  
Zhichao Fan ◽  
Run Li ◽  
Qingling Liu ◽  
Yutaka Kitamura

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