Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air
2016 ◽
Vol 383
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pp. 261-267
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2020 ◽
Vol 384
(19)
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pp. 126497
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2008 ◽
Vol 202
(12)
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pp. 2670-2676
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Keyword(s):
2014 ◽
Vol 50
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pp. 91-96
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2013 ◽
Vol 46
(43)
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pp. 435203
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