Numerical investigation of sputtering power effect on nano-tribological properties of tantalum-nitride film using molecular dynamics simulation
2016 ◽
Vol 367
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pp. 197-204
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1998 ◽
Vol 64
(620)
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pp. 1061-1068
2017 ◽
Vol 134
◽
pp. 93-99
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2021 ◽
2019 ◽
Vol 43
◽
pp. 12-19
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