Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

2011 ◽  
Vol 258 (3) ◽  
pp. 1261-1266 ◽  
Author(s):  
Szu-Ko Wang ◽  
Ting-Chun Lin ◽  
Sheng-Rui Jian ◽  
Jenh-Yih Juang ◽  
Jason S.-C. Jang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Glass Substrate ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Nanomechanical Properties ◽  
Post Annealing ◽  
Doped Zno

RF Magnetron Sputtering Processed Transparent Conductive Aluminum Doped ZnO thin Films with Excellent Optical and Electrical Properties

2021 ◽  
Author(s):  
Chunhu Zhao ◽  
Junfeng Liu ◽  
Yixin Guo ◽  
Yanlin Pan ◽  
Xiaobo Hu ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Carrier Concentration ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Band Model ◽  
Deposition Condition ◽  
Optical And Electrical Properties ◽  
Doped Zno

Abstract Aluminum doped ZnO thin films (AZO), which simultaneously transmit light and conduct electrical current, are widely applied in photovoltaic devices. To achieve high performance AZO thin films, the effects of RF magnetron sputtering conditions on the optical and electrical properties of the films has been explored. The optimized AZO thin films exhibit strong (002) orientated growth with hexagonal wurtzite structure. The minimum resistivity of 0.9Í10-3 Ω·cm, the highest carrier concentration of 2.8Í1020 cm-3, the best Hall mobility of 22.8 cm2·(V·s)-1 and average transmittance above 85% can be achieved at the optimum deposition condition of 0.2 Pa, 120 W and 200 °C. Considering the single parabolic band model, the bandgap shift by carrier concentration of the films can be attributed to the Burstein-Moss effect. The results indicate that RF magnetron sputtered AZO thin films are promising for solar cell applications relying on front contact layers.

scholarly journals Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

2011 ◽  
Vol 29 (5) ◽  
pp. 051514 ◽  
Author(s):  
B. P. Shantheyanda ◽  
V. O. Todi ◽  
K. B. Sundaram ◽  
A. Vijayakumar ◽  
I. Oladeji
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Doped Zno ◽  
Compositional Study

Study of H-related defects in Ga-doped ZnO thin films deposited by RF magnetron sputtering in Ar+H2 ambient

2016 ◽  
Vol 32 (7) ◽  
pp. 424-429
Author(s):  
D. L. Zhu ◽  
G. J. Wang ◽  
F. Jia ◽  
W. Y. Xu ◽  
S. Han ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Doped Zno
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