Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology

2011 ◽  
Vol 257 (16) ◽  
pp. 7119-7122 ◽  
Author(s):  
Ru-Yuan Yang ◽  
Min-Hang Weng ◽  
Cheng-Tang Pan ◽  
Chin-Min Hsiung ◽  
Chun-Chih Huang
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Flexible Substrate ◽  
Zno Thin Films ◽  
Vacuum Arc

Effect of the Bias Voltage on the Structure, Mechanical, Electronic and Optical Properties of the Low Temperature ZnO Thin Films Deposited by Using Cathodic Vacuum Arc Deposition System on Plastic Substrates

2013 ◽  
Vol 773-774 ◽  
pp. 287-292
Author(s):  
Ru Yuan Yang ◽  
Cheng Tang Pan ◽  
Chien Wei Huang
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Bias Voltage ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Plastic Substrates ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

The un-doped zinc oxide (ZnO) films on the polyethylene terephthalate (PET) substrate at a low temperature (<75°C) by using cathode vacuum arc deposition (CVAD) system with different negative substrate bias voltage applied between 0 and -100 V. The material, mechanical, optical and electrical properties were investigated and discussed. The results show that all ZnO thin films have (002) preferred orientation, an average transmittance was over than 70 % in the visible region. Calculated band gap values are all around 3.2 eV with the different substrate bias voltages. The ZnO thin films with resistivities as low as 10-3Ω*cm have been obtained by adjusting the substrate bias voltage on the plastic substrates.

Properties of low-temperature deposited ZnO thin films prepared by cathodic vacuum arc technology on different flexible substrates

2013 ◽  
Vol 539 ◽  
pp. 290-293 ◽  
Author(s):  
Cheng-Tang Pan ◽  
Ru-Yuan Yang ◽  
Min-Hang Weng ◽  
Chien-Wei Huang
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Flexible Substrates

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

The electrical, elemental, optical, and surface properties of Si-doped ZnO thin films prepared by thermionic vacuum arc

2017 ◽  
Vol 4 (9) ◽  
pp. 096404 ◽  
Author(s):  
Reza Mohammadigharehbagh ◽  
Soner Özen ◽  
Hafizittin Hakan Yudar ◽  
Suat Pat ◽  
Şadan Korkmaz
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Si Doped ◽  
Doped Zno ◽  
Thermionic Vacuum Arc

Low temperature electrochemical deposition of nanoporous ZnO thin films as novel NO2 sensors

2013 ◽  
Vol 90 ◽  
pp. 530-534 ◽  
Author(s):  
Shouli Bai ◽  
Chuanzhen Sun ◽  
Teng Guo ◽  
Ruixian Luo ◽  
Yuan Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Electrochemical Deposition ◽  
Zno Thin Films
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