Surface damage morphology investigations of silicon under millisecond laser irradiation

2010 ◽  
Vol 257 (5) ◽  
pp. 1583-1588 ◽  
Author(s):  
X. Wang ◽  
D.H. Zhu ◽  
Z.H. Shen ◽  
J. Lu ◽  
X.W. Ni
2016 ◽  
Vol 362 ◽  
pp. 290-296 ◽  
Author(s):  
R. Diaz ◽  
M. Chambonneau ◽  
P. Grua ◽  
J.-L. Rullier ◽  
J.-Y. Natoli ◽  
...  

1984 ◽  
Vol 35 ◽  
Author(s):  
W. R. Lambert ◽  
P. L. Trevor ◽  
M. T. Schulberg ◽  
M. J. Cardillo ◽  
J. C. Tully

ABSTRACTWe investigate the effects of Nd:YAG and excimer laser irradiation on the Ge(100) surface under UHV conditions over a temperature range 140 < T(K) < 300 using the surface sensitive probe of He atom diffraction. We study the effects of irradiation on surface damage and order using the apparent (2×1) ࢐ c(2×4) transition. We monitor surface contamination in situ. The temporal thermal response is modeled theoretically to aid in assessing the experimental results. The capability to maintain a Ge(100) surface at low temperatures free of contamination and well ordered is demonstrated.


2010 ◽  
Vol 107 (2) ◽  
pp. 023703 ◽  
Author(s):  
Giovanni Mannino ◽  
Corrado Spinella ◽  
Corrado Bongiorno ◽  
Giuseppe Nicotra ◽  
Flora Mercorillo ◽  
...  

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