Characterization of diamond-like carbon films by SEM, XRD and Raman spectroscopy

2010 ◽  
Vol 256 (21) ◽  
pp. 6403-6407 ◽  
Author(s):  
Hua Pang ◽  
Xingquan Wang ◽  
Guling Zhang ◽  
Huan Chen ◽  
Guohua Lv ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Carbon Films ◽  
Diamond Like Carbon

Monitoring Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

2013 ◽  
Vol 538 ◽  
pp. 281-284 ◽  
Author(s):  
S.N. Svitasheva ◽  
George A. Pozdnyakov
Keyword(s):  
Raman Spectroscopy ◽  
Supersonic Flow ◽  
Spectroscopic Ellipsometry ◽  
Structural Characterization ◽  
Carbon Films ◽  
New Method ◽  
Diamond Like Carbon

Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Two methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and Raman spectroscopy.

scholarly journals Characterization of Ultra-Thin Diamond-Like Carbon Films by SEM/EDX

Coatings ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 729
Author(s):  
Chanida Puttichaem ◽  
Guilherme P. Souza ◽  
Kurt C. Ruthe ◽  
Kittipong Chainok
Keyword(s):  
Regression Models ◽  
Hard Disk Drives ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Disk Drives ◽  
Cross Sectional ◽  
Protective Films ◽  
High Throughput Method ◽  
Multiple Regression Models

A novel, high throughput method to characterize the chemistry of ultra-thin diamond-like carbon films is discussed. The method uses surface sensitive SEM/EDX to provide substrate-specific, semi-quantitative silicon nitride/DLC stack composition of protective films extensively used in the hard disk drives industry and at Angstrom-level. SEM/EDX output is correlated to TEM to provide direct, gauge-capable film thickness information using multiple regression models that make predictions based on film constituents. The best model uses the N/Si ratio in the films, instead of separate Si and N contributions. Topography of substrate/film after undergoing wear is correlatively and compositionally described based on chemical changes detected via the SEM/EDX method without the need for tedious cross-sectional workflows. Wear track regions of the substrate have a film depleted of carbon, as well as Si and N in the most severe cases, also revealing iron oxide formation. Analysis of film composition variations around industry-level thicknesses reveals a complex interplay between oxygen, silicon and nitrogen, which has been reflected mathematically in the regression models, as well as used to provide valuable insights into the as-deposited physics of the film.

Characterization of carbon films microstructure by atomic force microscopy and Raman spectroscopy

1994 ◽  
Vol 76 (6) ◽  
pp. 3443-3447 ◽  
Author(s):  
J. M. Yáñez‐Limón ◽  
F. Ruiz ◽  
J. González‐Hernández ◽  
C. Vázquez‐López ◽  
E. López‐Cruz
Keyword(s):  
Raman Spectroscopy ◽  
Atomic Force Microscopy ◽  
Carbon Films ◽  
Force Microscopy ◽  
Atomic Force

scholarly journals Application of a photothermal displacement technique for the characterization of diamond-like carbon films

1994 ◽  
Vol 04 (C7) ◽  
pp. C7-237-C7-240
Author(s):  
G. Amato ◽  
G. Benedetto ◽  
L. Boarino ◽  
M. Maringelli ◽  
R. Spagnolo
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon

Tribological characterization of diamond-like carbon films on nonledeburitic high-speed steels

2000 ◽  
Vol 45 (3) ◽  
pp. 233-239 ◽  
Author(s):  
J Richter ◽  
I.M Hutchings ◽  
T.W Clyne ◽  
D.N Allsopp ◽  
X Peng
Keyword(s):  
High Speed ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Tribological Characterization

Characterization of diamond-like carbon films by fine scale indentation measurements

1992 ◽  
Vol 1 (2-4) ◽  
pp. 355-359 ◽  
Author(s):  
J. Smith ◽  
P. Holiday ◽  
A. Dehbi-Alaoui ◽  
A. Matthews
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Fine Scale

Characterization of diamond-like carbon films deposited on Zr-2.5Nb pressure tube material by excimer laser

1997 ◽  
Vol 32 (9) ◽  
pp. 1253-1260
Author(s):  
K.F. Amouzouvi ◽  
L.J. Clegg ◽  
C. Möβner ◽  
H. Tran ◽  
P. Grant ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Pressure Tube ◽  
Diamond Like Carbon ◽  
Tube Material
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