Modification and smoothing of patterned surface by gas cluster ion beam irradiation

2009 ◽  
Vol 256 (4) ◽  
pp. 1110-1113 ◽  
Author(s):  
T. Hirota ◽  
N. Toyoda ◽  
A. Yamamoto ◽  
I. Yamada
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Patterned Surface ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation

2020 ◽  
Vol 700 ◽  
pp. 121637
Author(s):  
A.E. Ieshkin ◽  
D.S. Kireev ◽  
A.A. Tatarintsev ◽  
V.S. Chernysh ◽  
B.R. Senatulin ◽  
...  
Keyword(s):  
Surface Topography ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation

2014 ◽  
Vol 117 (2) ◽  
pp. 719-723 ◽  
Author(s):  
Ee Jin Teo ◽  
Noriaki Toyoda ◽  
Chengyuan Yang ◽  
Andrew A. Bettiol ◽  
Jing Hua Teng
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Fast Neutral Ar Penetration during Gas Cluster Ion Beam Irradiation into Magnetic Thin Films

2003 ◽  
Vol 792 ◽  
Author(s):  
Shigeru Kakuta ◽  
Toshio Seki ◽  
Shinji Sasaki ◽  
Kenji Furusawa ◽  
Takaaki Aoki ◽  
...  
Keyword(s):  
Ion Beam ◽  
Magnetic Thin Films ◽  
Cube Root ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Ion Density ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Acceleration Voltage ◽  
Secondary Ion

ABSTRACTAr penetration during gas cluster ion beam (GCIB) irradiation has been investigated using secondary ion mass spectroscopy (SIMS). The concentration of Ar rose to a maximum and then decreased gradually with increasing depth. The depth of the Ar penetration peak increased in proportion to the cube root of the acceleration voltage of GCIB and was independent of ion dose. Ar penetration was attributed to fast neutrals in the GCIB and was successfully suppressed by decreasing the pressure of the space downstream of the GCIB or decreasing the monomer ion density in order to suppress charge transfer collisions.

Enhanced plasmonic performance in ultrathin silver structures using Gas Cluster Ion Beam Irradiation

CLEO: 2014 ◽  
2014 ◽  
Author(s):  
Ee Jin Teo ◽  
Noriaki Toyoda ◽  
Chengyuan Yang ◽  
Bing Wang ◽  
Nan Zhang ◽  
...  
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Low damage smoothing of magnetic materials using off-normal gas cluster ion beam irradiation

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8632-8636 ◽  
Author(s):  
S. Kakuta ◽  
S. Sasaki ◽  
K. Furusawa ◽  
T. Seki ◽  
T. Aoki ◽  
...  
Keyword(s):  
Magnetic Materials ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam
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