Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source

2008 ◽  
Vol 255 (4) ◽  
pp. 1440-1442 ◽  
Author(s):  
X. Ravanel ◽  
C. Trouiller ◽  
M. Juhel ◽  
C. Wyon ◽  
L.F.Tz. Kwakman ◽  
...  
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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