Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases

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Xiubo Tian ◽  
Shiqin Yang ◽  
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2008 ◽  
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S.C. Lee ◽  
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Vol 135 (11) ◽  
pp. 45983 ◽  
Author(s):  
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Irina V. Osorgina ◽  
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...  

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