Fabrication of multilayer thin film filters by hydrofluoric acid bonding
2007 ◽
Vol 253
(11)
◽
pp. 4906-4910
◽
Keyword(s):
2019 ◽
Vol 1313
◽
pp. 012039
Keyword(s):
2010 ◽
Vol 74
(1)
◽
pp. 46-49
◽
2005 ◽
Vol 44
(No. 39)
◽
pp. L1225-L1227
◽
1983 ◽
Vol 1
(1)
◽
pp. 116-121
◽
Keyword(s):