High-density plasma etching of indium–zinc oxide films in Ar/Cl2 and Ar/CH4/H2 chemistries

2006 ◽  
Vol 253 (5) ◽  
pp. 2752-2757 ◽  
Author(s):  
W.T. Lim ◽  
L. Stafford ◽  
Ju-Il Song ◽  
Jae-Soung Park ◽  
Y.W. Heo ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Plasma Etching ◽  
Oxide Films ◽  
High Density ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide ◽  
Density Plasma

Characterization of Zinc Oxide Films Grown by a Newly Developed Plasma Enhanced MOCVD Employing Microwave Excited High Density Plasma

2007 ◽  
Author(s):  
Hirokazu Asahara ◽  
Atsutoshi Inokuchi ◽  
Kohei Watanuki ◽  
Masaki Hirayama ◽  
Akinobu Teramoto ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
High Density ◽  
Zinc Oxide Films ◽  
Density Plasma

Physical properties and growth kinetics of co-sputtered indium-zinc oxide films

2009 ◽  
Vol 24 (9) ◽  
pp. 095019 ◽  
Author(s):  
Changgang Huang ◽  
Meili Wang ◽  
Quanlin Liu ◽  
Yongge Cao ◽  
Zhonghua Deng ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Physical Properties ◽  
Growth Kinetics ◽  
Oxide Films ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide ◽  
Kinetics Of

Advantages of using amorphous indium zinc oxide films for window layer in Cu(In,Ga)Se2 solar cells

2012 ◽  
Vol 520 (6) ◽  
pp. 2119-2122 ◽  
Author(s):  
Moe Warasawa ◽  
Akira Kaijo ◽  
Mutsumi Sugiyama
Keyword(s):  
Zinc Oxide ◽  
Solar Cells ◽  
Oxide Films ◽  
Window Layer ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

2007 ◽  
Vol 46 (12) ◽  
pp. 7806-7811 ◽  
Author(s):  
Eriko Nishimura ◽  
Tomoko Sasabayashi ◽  
Norihiro Ito ◽  
Yasushi Sato ◽  
Kentaro Utsumi ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

Electron transport and optical characteristics in amorphous indium zinc oxide films

2006 ◽  
Vol 352 (9-20) ◽  
pp. 1471-1474 ◽  
Author(s):  
R. Martins ◽  
P. Almeida ◽  
P. Barquinha ◽  
L. Pereira ◽  
A. Pimentel ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Electron Transport ◽  
Oxide Films ◽  
Optical Characteristics ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide
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