Molecular dynamics study of particle emission by reactive cluster ion impact

2006 ◽  
Vol 252 (19) ◽  
pp. 6466-6469 ◽  
Author(s):  
Takaaki Aoki ◽  
Jiro Matsuo
Keyword(s):  
Molecular Dynamics ◽  
Particle Emission ◽  
Cluster Ion ◽  
Ion Impact ◽  
Reactive Cluster

Molecular Dynamics Simulation of Fullerene Cluster Ion Impact

1997 ◽  
Vol 504 ◽  
Author(s):  
Takaaki Aoki ◽  
Toshio Seki ◽  
Masahiro Tanomura ◽  
Jiro Matsuo ◽  
Zinetulla Insepov ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Kinetic Energy ◽  
Carbon Cluster ◽  
Dynamics Simulation ◽  
Multiple Collision ◽  
Sapphire Substrates ◽  
Cluster Ion ◽  
Ion Impact ◽  
Dynamics Simulations ◽  
Cascade Damage

ABSTRACTIn order to interpret the projection range and to reveal the mechanism of damage formation by cluster ion impact, molecular dynamics simulations of a fullerene carbon cluster (C60) impacting on diamond (001) surfaces were performed. When the kinetic energy of C60 is as low as 200eV/atom, C60 implants into the substrate deeper than a monomer ion with the same energy per atom because of the clearing-way effect. The kinetic energy of the cluster disperses isotropically because of the multiple-collision effect, and then a large hemispherical damage region is formed. When the energy of the cluster is as high as 2keV/atom, the cluster dissociates in the substrate, and then cascade damage is formed like in a case of a monomer ion impact. The projection range of incident atoms becomes similar to that of the monomer with the same energy per atom. However, the number of displacements of C60 is larger than the summation of 60 monomer carbons. The displacement yield of fullerene is 4 to 7 times higher than that of monomer carbon. This result agrees with the measurement of the displacements made on sapphire substrates with C60 and C2 irradiation.

Molecular dynamics study of monomer and dimer emission processes with high energy gas cluster ion impact

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8427-8430 ◽  
Author(s):  
Takaaki Aoki ◽  
Toshio Seki ◽  
Satoshi Ninomiya ◽  
Jiro Matsuo
Keyword(s):  
Molecular Dynamics ◽  
High Energy ◽  
Cluster Ion ◽  
Ion Impact

MOLECULAR DYNAMICS STUDY OF SUFACE STRUCTURE AND SPUTTERING PROCESS BY SEQUENCIAL FLUORINE CLUSTER IMPACTS

2004 ◽  
Vol 843 ◽  
Author(s):  
Takaaki Aoki ◽  
Jiro Matsuo
Keyword(s):  
Molecular Dynamics ◽  
Classical Model ◽  
Cluster Ions ◽  
Desorption Process ◽  
Cluster Emission ◽  
Mound Structure ◽  
Cluster Ion ◽  
Ion Impact ◽  
Pillar Structure ◽  
Dynamics Simulations

ABSTRACTIn order to study the surface reaction process under cluster ion impact, molecular dynamics simulations of sequential cluster impacts of fluorine and neon clusters were performed. (F2)300 and Ne600 clusters were accelerated with totally 6keV and irradiated on bare Si(100) target. By iterating impact simulation sequentially, change of surface morphology and composition of desorbed materials were studied. In the case of fluorine cluster impact, the rough surface structure was made compared with neon cluster impact because fluorine atoms adsorb on the target, which work to keep pillar structure on the surface, whereas Ne atoms evaporate immediately leaving spherical mound structure on the surface. From the study of desorption process, it was observed that large number of Si atoms are desorbed in the form of silicon fluorides. The major sputtered material was SiF2, but various types of silicon-fluorides, including the molecules consists of several tens to hundreds silicon and fluorine atoms, were observed. The distribution of clusters in desorbed materials obeyed the classical model of cluster emission from quasi-liquid phase excited with ion bombardment. From these results, the irradiation effects of reactive cluster ions were discussed.

Molecular Dynamics Study of Ion Impact Phenomena and Compressive Stress in Thin Films

1993 ◽  
Vol 317 ◽  
Author(s):  
N.A. Marks ◽  
P. Guan ◽  
D.R. Mckenzie ◽  
B.A. PailThorpe
Keyword(s):  
Molecular Dynamics ◽  
Three Dimensional ◽  
Carbon Films ◽  
Loss Mechanism ◽  
Ion Energy ◽  
Lennard Jones ◽  
Impact Phenomena ◽  
Ion Impact ◽  
Dynamics Simulations ◽  
The Impact

ABSTRACTMolecular dynamics simulations of nickel and carbon have been used to study the phenomena due to ion impact. The nickel and carbon interactions were described using the Lennard-Jones and Stillinger-Weber potentials respectively. The phenomena occurring after the impact of 100 e V to 1 keV ions were studied in the nickel simulations, which were both two and three-dimensional. Supersonic focussed collision sequences (or focusons) were observed, and associated with these focusons were unexpected sonic bow waves, which were a major energy loss mechanism for the focuson. A number of 2D carbon films were grown and the stress in the films as a function of incident ion energy was Measured. With increasing energy the stress changed from tensile to compressive and reached a maximum around 50 eV, in agreement with experiment.

Gas cluster ion bombardment of GaAs: XPS depth profiles and molecular dynamics modelling

2021 ◽  
Author(s):  
Helen Oppong-Mensah ◽  
Mark A. Baker ◽  
Tim S. Nunney ◽  
Richard G. White ◽  
Jonathon England ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Ion Bombardment ◽  
Depth Profiles ◽  
Cluster Ion ◽  
Dynamics Modelling
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