A study of the optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

Li-Jian Meng; V. Teixeira; H.N. Cui; Frank Placido; Z. Xu; M.P. dos Santos

doi:10.1016/j.apsusc.2005.10.012

A study of the optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2005.10.012 ◽

2006 ◽

Vol 252 (22) ◽

pp. 7970-7974 ◽

Cited By ~ 32

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H.N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

The optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

10.1117/12.668092 ◽

2006 ◽

Cited By ~ 1

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H. N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

DC reactive magnetron sputtering with Ar ion-beam assistance for titanium oxide films

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00286-4 ◽

2002 ◽

Vol 158-159 ◽

pp. 457-464 ◽

Cited By ~ 19

Author(s):

S.-H. Kim ◽

J.-H. Lee ◽

C.K. Hwangbo ◽

S.M. Lee

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Ion Beam ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO2 and O2 as Reactive Gas

Acta Metallurgica Sinica (English Letters) ◽

10.1007/s40195-014-0049-z ◽

2014 ◽

Vol 27 (2) ◽

pp. 239-244 ◽

Cited By ~ 6

Author(s):

Dong Xie ◽

Feng Wen ◽

Wenmao Yang ◽

Xueyuan Li ◽

Yongxiang Leng ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Carbon Doped ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films ◽

Reactive Gas

Download Full-text

Investigations of titanium oxide films deposited by d.c. reactive magnetron sputtering in different sputtering pressures

Thin Solid Films ◽

10.1016/0040-6090(93)90200-9 ◽

1993 ◽

Vol 226 (1) ◽

pp. 22-29 ◽

Cited By ~ 180

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Study of the composition of titanium oxide films deposited by reactive magnetron sputtering

Recent Contributions to Physics ◽

10.26577/rcph.2020.v74.i3.06 ◽

2020 ◽

Vol 74 (3) ◽

Author(s):

D. Aubakirova ◽

N. Yerdybaeva ◽

V. Pichugin

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Cited By ~ 3

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

Download Full-text

Aluminum titanium oxide alloys: Deposition of amorphous, transparent, corrosion-resistant films by pulsed DC reactive magnetron sputtering with RF substrate bias

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.03.039 ◽

2015 ◽

Vol 36 ◽

pp. 96-102 ◽

Cited By ~ 8

Author(s):

Juan J. Díaz León ◽

Matthew P. Garrett ◽

Junce Zhang ◽

Nobuhiko P. Kobayashi

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Reactive Magnetron Sputtering ◽

Substrate Bias ◽

Reactive Magnetron ◽

Corrosion Resistant ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

Download Full-text

Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

Materials Letters ◽

10.1016/s0167-577x(02)01106-0 ◽

2003 ◽

Vol 57 (13-14) ◽

pp. 1925-1933 ◽

Cited By ~ 25

Author(s):

Arshad Mahmood ◽

Nikifor Rakov ◽

Mufei Xiao

Keyword(s):

Thin Films ◽

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

Download Full-text

Transport and optical properties of indium tin oxide films fabricated by reactive magnetron sputtering

Korean Journal of Optics and Photonics ◽

10.3807/kjop.2003.14.3.343 ◽

2003 ◽

Vol 14 (3) ◽

pp. 343-348

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Oxide Films

Download Full-text

Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.044 ◽

2008 ◽

Vol 202 (11) ◽

pp. 2354-2357 ◽

Cited By ~ 11

Author(s):

M. Rubio-Roy ◽

E. Pascual ◽

M.C. Polo ◽

J.L. Andújar ◽

E. Bertran

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

Download Full-text