The effect of applied dc bias voltage on the properties of a-C:H films prepared in a dual dc–rf plasma system
2004 ◽
Vol 227
(1-4)
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pp. 364-372
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1997 ◽
Vol 48
(3)
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pp. 317-323
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1992 ◽
Vol 18
(3)
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pp. 177-183
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2018 ◽
Vol 83
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pp. 115-118
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2019 ◽
Vol 45
(9)
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pp. 11989-12000
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Keyword(s):
Keyword(s):
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