An intelligent hybrid system for wafer lot output time prediction

2007 ◽  
Vol 21 (1) ◽  
pp. 55-65 ◽  
Author(s):  
Toly Chen
Keyword(s):  
Hybrid System ◽  
Time Prediction ◽  
Output Time ◽  
Output Time Prediction

Real Time Prediction Method of Sensor Output Time Series

2014 ◽  
Vol 912-914 ◽  
pp. 1322-1326
Author(s):  
Zhi Cheng Liu
Keyword(s):  
Neural Network ◽  
Time Series ◽  
Real Time ◽  
Simulation Experiment ◽  
Prediction Method ◽  
Sensor Output ◽  
Wavelet Filtering ◽  
Time Prediction ◽  
Network Method ◽  
Output Time

In order to improve the real time prediction precision of sensor output time series, the predictable inner mechanism of time series is analyzed, and a method using wavelet filtering and neural network is proposed. Sensor output time series are first handled with wavelet filtering, and then predicted by neural network method. The proposed method can eliminate effect of measurement noise on prediction precision. Simulation experiment shows a higher prediction precision by the method. A new idea is given to increase prediction precision of sensor output time series by neural network-based methods.

Sign in / Sign up

Export Citation Format

Share Document