The influence of mask substrate thickness on exposure and development times for the LIGA process
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2011 ◽
Vol 53
(7)
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pp. 2406-2412
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2002 ◽
Vol 46
(8)
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pp. 1155-1161
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2016 ◽
Vol 294
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pp. 869-878
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2013 ◽
Vol 475-476
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pp. 1624-1628
2022 ◽
Vol 17
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pp. 0-0