The influence of mask substrate thickness on exposure and development times for the LIGA process

2000 ◽  
Vol 6 (3) ◽  
pp. 99-102 ◽  
Author(s):  
S. K. Griffiths ◽  
A. Ting ◽  
J. M. Hruby
Coatings ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 479
Author(s):  
Yang Zhao ◽  
Fan Sun ◽  
Peng Jiang ◽  
Yongle Sun

The effects of surface roughness on the stresses in an alumina scale formed on a Fecralloy substrate are investigated. Spherical indenters were used to create indents with different radii and depths to represent surface roughness and then the roughness effect was studied comprehensively. It was found that the residual stresses in the alumina scale formed around the rough surface are almost constant and they are dominated by the curvature rather than the depth of the roughness. Oxidation changes the surface roughness. The edge of the indent was sharpened after oxidation and the residual stress there was released presumably due to cracking. The residual stresses in the alumina scale decrease with increase in oxidation time, while the substrate thickness has little effect, given that the substrate is thicker than the alumina scale. Furthermore, the effect of roughness on the oxide growth stress is analysed. This work indicates that the surface roughness should be considered for evaluation of stresses in coatings.


2011 ◽  
Vol 53 (7) ◽  
pp. 2406-2412 ◽  
Author(s):  
W.N. Liu ◽  
X. Sun ◽  
E. Stephens ◽  
M. Khaleel

1992 ◽  
Vol 70 (2-3) ◽  
pp. 173-178 ◽  
Author(s):  
Ioanna Diamandi ◽  
Costas Mertzianidis ◽  
John N. Sahalos

The far-field pattern characteristics of line sources lying between the slabs of a four-dielectric substrate configuration are presented. The patterns are calculated for several cases of the substrate thickness as well as for several line-source locations. The considerations that are made give useful applications in remote sensing and microstrip antennas.


2002 ◽  
Vol 46 (8) ◽  
pp. 1155-1161 ◽  
Author(s):  
Jong Soo Ko ◽  
Weiguo Liu ◽  
Weiguang Zhu ◽  
Byung Man Kwak

2016 ◽  
Vol 294 (5) ◽  
pp. 869-878 ◽  
Author(s):  
M. Alizadeh-Osgouei ◽  
S. Agbolaghi ◽  
S. Abbaspoor ◽  
F. Abbasi

2013 ◽  
Vol 475-476 ◽  
pp. 1624-1628
Author(s):  
Hasnizah Aris ◽  
David Fitrio ◽  
Jack Singh

The development and utilization of different structural materials, optimization of the cantilever geometry and power harvesting circuit are the most commonly methods used to increase the power density of MEMS energy harvester. This paper discusses the cantilever geometry optimization process of low power and low frequency of bimorph MEMS energy harvester. Three piezoelectric materials, ZnO, AlN and PZT are deposited on top and bottom of the cantilever Si substrate. This study focuses on the optimization of the cantilevers length, width, substrate thickness and PZe thickness in order to achieve lower than 600 Hz of resonant frequency. The harvested power for this work is in the range of 0.02 ~ 194.49 nW.


This paper presents the design of 2*1 and 4*1 RFID reader microstrip array antenna at 2.4GHz for the Internet of things (IoT) networks which are Zigbee, Bluetooth and WIFI. The proposed antenna is composed of identical circular shapes radiating patches printed in FR4 substrate. The dielectric constant εr and substrate thickness h are 4.4 and 1.6mm, respectively. The 2*1 and 4*1 array antennas present a gain improvement of 27.3% and 61.9%, respectively. The single,2*1 and 4*1 array antennas were performed with CADFEKO.


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