Relative line intensity measurement in absorption spectra using a tunable diode laser at 1.6 μm: application to the determination of 13CO2/12CO2 isotope ratio

2001 ◽  
Vol 72 (2) ◽  
pp. 237-240 ◽  
Author(s):  
R. Chaux ◽  
B. Lavorel
Keyword(s):  
Diode Laser ◽  
Absorption Spectra ◽  
Line Intensity ◽  
Isotope Ratio ◽  
Intensity Measurement ◽  
Tunable Diode Laser ◽  
Relative Line Intensity ◽  
Relative Line

Absolute line intensity measurements in the ν2 bands of HDO and D2O using a tunable diode laser spectrometer

1986 ◽  
Vol 120 (2) ◽  
pp. 239-245 ◽  
Author(s):  
K.B. Thakur ◽  
Curtis P. Rinsland ◽  
Mary Ann H. Smith ◽  
D.Chris Benner ◽  
V. Malathy Devi
Keyword(s):  
Diode Laser ◽  
Line Intensity ◽  
Tunable Diode Laser ◽  
Laser Spectrometer ◽  
Diode Laser Spectrometer ◽  
Intensity Measurements

Gaseous Contaminant Measurement for Semiconductor Processing by Diode Laser Spectroscopy

1995 ◽  
Vol 38 (5) ◽  
pp. 22-29
Author(s):  
James McAndrew ◽  
Ronald Inman ◽  
Benjamin Jurcik
Keyword(s):  
Diode Laser ◽  
Fluid Dynamic ◽  
Air Separation ◽  
Tunable Diode Laser ◽  
Laser Absorption ◽  
Diode Laser Spectroscopy ◽  
Diode Laser Absorption ◽  
Gaseous Contaminant

Tunable diode laser absorption spectroscopy (TDLAS) is a novel tool for purity measurement in microelectronic process gases and environments. It is compatible with any matrix gas and extremely sensitive. This paper describes the application of a laboratory TDLAS instrument to measurement of CO, CO2, and H2O with sub-ppb sensitivity, including determination of a CO level of 0.35± 0.2 ppb in nitrogen samples from an air separation plant. Fluid dynamic simulation was used to optimize the design of the cell used for H20 measurements. TDLAS lends itself to the study of contamination sources in situ. As examples, measurements of CO generation in sampling vessels and of CO2 outgassing in an electropolished stainless steel chamber are briefly discussed.

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