Indium and tin oxide polycrystalline thin films as NO gas sensors produced by reactive pulsed laser ablation and deposition

1999 ◽  
Vol 69 (7) ◽  
pp. S675-S677 ◽  
Author(s):  
V. Marotta ◽  
S. Orlando ◽  
G.P. Parisi ◽  
A. Giardini
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Gas Sensors ◽  
Tin Oxide ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Polycrystalline Thin Films

Highly conducting indium tin oxide (ITO) thin films deposited by pulsed laser ablation

1999 ◽  
Vol 350 (1-2) ◽  
pp. 79-84 ◽  
Author(s):  
F.O. Adurodija ◽  
H. Izumi ◽  
T. Ishihara ◽  
H. Yoshioka ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Ito Thin Films

Synthesis of thin films of polycrystalline ferroelectric BiNbO4 on Si by pulsed laser ablation

1998 ◽  
Vol 13 (5) ◽  
pp. 1113-1116 ◽  
Author(s):  
Soma Chattopadhyay ◽  
Pushan Ayyub ◽  
R. Pinto ◽  
M. S. Multani
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
X Ray Diffraction ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Polycrystalline Thin Films ◽  
Ambient Oxygen

The stibiotantalite (ABO4) family includes a number of ferroelectrics and antiferroelectrics with excellent potential for applications. We report the deposition of phase-pure, polycrystalline thin films of BiNbO4 on Si(100) substrates using pulsed laser ablation. The deposition conditions were optimized with respect to substrate temperature, laser parameters, and the ambient oxygen pressure. The films were characterized by x-ray diffraction, energy dispersive x-ray analysis, and Raman spectroscopy, while their microstructure was studied by atomic force microscopy and scanning electron microscopy. Dielectric hysteresis studies indicated that films with a thickness below ≈250 nm are ferroelectric, while thicker ones are antiferroelectric.

Observations on the growth of YBa2Cu3O7-δ thin films on MgO by pulsed-laser ablation

1991 ◽  
Vol 49 ◽  
pp. 1068-1069
Author(s):  
M. Grant Norton ◽  
C. Barry Carter
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Laser Ablation ◽  
Substrate Surface ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Laser Ablation Process ◽  
Deposition Parameters

Pulsed-laser ablation has been widely used to produce high-quality thin films of YBa2Cu3O7-δ on a range of substrate materials. The nonequilibrium nature of the process allows congruent deposition of oxides with complex stoichiometrics. In the high power density regime produced by the UV excimer lasers the ablated species includes a mixture of neutral atoms, molecules and ions. All these species play an important role in thin-film deposition. However, changes in the deposition parameters have been shown to affect the microstructure of thin YBa2Cu3O7-δ films. The formation of metastable configurations is possible because at the low substrate temperatures used, only shortrange rearrangement on the substrate surface can occur. The parameters associated directly with the laser ablation process, those determining the nature of the process, e g. thermal or nonthermal volatilization, have been classified as ‘primary parameters'. Other parameters may also affect the microstructure of the thin film. In this paper, the effects of these ‘secondary parameters' on the microstructure of YBa2Cu3O7-δ films will be discussed. Examples of 'secondary parameters' include the substrate temperature and the oxygen partial pressure during deposition.

ZnS thin films grown on Si(100) by XeCl pulsed laser ablation

2001 ◽  
Vol 177 (1-2) ◽  
pp. 73-77 ◽  
Author(s):  
K.T Hillie ◽  
C Curren ◽  
H.C Swart
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation

Reactively sputtered indium tin oxide polycrystalline thin films as NO and NO2 gas sensors

1990 ◽  
Vol 186 (2) ◽  
pp. 349-360 ◽  
Author(s):  
G. Sberveglieri ◽  
P. Benussi ◽  
G. Coccoli ◽  
S. Groppelli ◽  
P. Nelli
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Polycrystalline Thin Films ◽  
No2 Gas Sensors

Nano-ionic thin films of gadolinia-doped ceria prepared by pulsed laser ablation

Ionics ◽  
2007 ◽  
Vol 13 (5) ◽  
pp. 343-348 ◽  
Author(s):  
P. Kuppusami ◽  
K. Muthukkumaran ◽  
R. Divakar ◽  
R. Kesavamoorthy ◽  
E. Mohandas ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Doped Ceria
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