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Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation
Applied Physics A
◽
10.1007/s003390051408
◽
1999
◽
Vol 69
(7)
◽
pp. S319-S322
◽
Cited By ~ 7
Author(s):
D. Schäfer
◽
J. Ihlemann
◽
K. Mann
◽
G. Marowsky
Keyword(s):
Laser Ablation
◽
Excimer Laser
◽
Diffractive Optical Elements
◽
Optical Elements
Download Full-text
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Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel
Optics Express
◽
10.1364/oe.16.014044
◽
2008
◽
Vol 16
(18)
◽
pp. 14044
◽
Cited By ~ 5
Author(s):
Estelle Neiss
◽
Manuel Flury
◽
Loïc Mager
◽
Jean-Luc Rehspringer
◽
Alain Fort
◽
...
Keyword(s):
Laser Ablation
◽
Excimer Laser
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◽
Diffractive Optical Elements
◽
Optical Elements
◽
Excimer Laser Ablation
◽
Multi Level
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Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation
Applied Optics
◽
10.1364/ao.36.004660
◽
1997
◽
Vol 36
(20)
◽
pp. 4660
◽
Cited By ~ 31
Author(s):
Xiaomei Wang
◽
James R. Leger
◽
Robert H. Rediker
Keyword(s):
Laser Ablation
◽
Excimer Laser
◽
Diffractive Optical Elements
◽
Optical Elements
◽
Excimer Laser Ablation
◽
Rapid Fabrication
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Excimer laser fabrication of diffractive optical elements
Materials Science in Semiconductor Processing
◽
10.1016/s1369-8001(00)00091-3
◽
2000
◽
Vol 3
(5-6)
◽
pp. 481-486
◽
Cited By ~ 9
Author(s):
R.J. Winfield
◽
M. Meister
◽
G.M. Crean
◽
S. Paineau
Keyword(s):
Excimer Laser
◽
Diffractive Optical Elements
◽
Optical Elements
◽
Laser Fabrication
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Fabrication of multilevel reflective diffractive optical elements by means of laser ablation lithography
10.1117/12.545394
◽
2004
◽
Author(s):
Sandrine Aubry
◽
Philippe Gerard
◽
Manuel Flury
◽
Abderrazzaq Benatmane
◽
Jean Pierre Schunck
◽
...
Keyword(s):
Laser Ablation
◽
Diffractive Optical Elements
◽
Optical Elements
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Rapid prototyping of diffractive optical elements for high-power lasers using laser ablation lithography fabrication and coherence probe microscopy analysis
Optical Engineering
◽
10.1117/1.1501569
◽
2002
◽
Vol 41
(10)
◽
pp. 2407
◽
Cited By ~ 9
Author(s):
Abderrazzaq Benatmane
Keyword(s):
Laser Ablation
◽
Rapid Prototyping
◽
High Power
◽
Diffractive Optical Elements
◽
Optical Elements
◽
High Power Lasers
◽
Probe Microscopy
◽
Microscopy Analysis
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Excimer laser micromachining for rapid fabrication of diffractive optical elements
Applied Optics
◽
10.1364/ao.36.004666
◽
1997
◽
Vol 36
(20)
◽
pp. 4666
◽
Cited By ~ 57
Author(s):
Gregory P. Behrmann
◽
Michael T. Duignan
Keyword(s):
Excimer Laser
◽
Laser Micromachining
◽
Diffractive Optical Elements
◽
Optical Elements
◽
Rapid Fabrication
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Rapid fabrication of diffractive optical elements by excimer laser micromachining
10.1117/12.273723
◽
1997
◽
Author(s):
Michael T. Duignan
◽
Gregory P. Behrmann
Keyword(s):
Excimer Laser
◽
Laser Micromachining
◽
Diffractive Optical Elements
◽
Optical Elements
◽
Rapid Fabrication
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Fabrication of diffractive optical elements by ArF-laser ablation of fused silica
10.1117/12.479226
◽
2003
◽
Cited By ~ 6
Author(s):
Jozsef Bekesi
◽
Dirk Schaefer
◽
Juergen Ihlemann
◽
Peter Simon
Keyword(s):
Laser Ablation
◽
Fused Silica
◽
Diffractive Optical Elements
◽
Optical Elements
◽
Arf Laser
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Excimer laser micromachining for fabrication of diamond diffractive optical elements
10.1117/12.387570
◽
2000
◽
Cited By ~ 2
Author(s):
Vitali I. Konov
◽
V. V. Kononenko
◽
Sergej M. Pimenov
◽
Alexander M. Prokhorov
◽
Vladimir S. Pavelyev
◽
...
Keyword(s):
Excimer Laser
◽
Laser Micromachining
◽
Diffractive Optical Elements
◽
Optical Elements
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Analysis of the excimer laser ablation characteristics of bisphenol a polycarbonate in ambient air and under thin film laminar flow water immersion
10.2351/1.5061313
◽
2008
◽
Cited By ~ 1
Author(s):
C. F. Dowding
◽
J. Lawrence
Keyword(s):
Thin Film
◽
Laser Ablation
◽
Laminar Flow
◽
Bisphenol A
◽
Excimer Laser
◽
Water Immersion
◽
Ambient Air
◽
Bisphenol A Polycarbonate
◽
Excimer Laser Ablation
◽
Ablation Characteristics
Download Full-text
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