Diamond-like carbon layer formation on graphite by excimer laser irradiation

1998 ◽  
Vol 66 (6) ◽  
pp. 659-661 ◽  
Author(s):  
Á. Mechler ◽  
P. Heszler ◽  
Z. Kántor ◽  
T. Szörényi ◽  
Z. Bor
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Carbon Layer ◽  
Diamond Like Carbon ◽  
Layer Formation ◽  
Excimer Laser Irradiation

Excimer laser irradiation induced formation of diamond-like carbon layer on graphite

1999 ◽  
Vol 138-139 ◽  
pp. 174-178 ◽  
Author(s):  
Ádám Mechler ◽  
Péter Heszler ◽  
Zoltán Kántor ◽  
Tamás Szörényi ◽  
Zsolt Bor
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Carbon Layer ◽  
Diamond Like Carbon ◽  
Excimer Laser Irradiation

Nitride layer formation by multipulse excimer laser irradiation of solid samples

1990 ◽  
Author(s):  
Emilia D'Anna ◽  
Gilberto Leggieri ◽  
Armando Luches ◽  
Maurizio Martino ◽  
Antonio L. Perrone ◽  
...  
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Nitride Layer ◽  
Layer Formation ◽  
Solid Samples ◽  
Excimer Laser Irradiation

Surface modification of inorganic solid oxides by excimer laser irradiation

1989 ◽  
Author(s):  
Kaoru Igarashi ◽  
Hideaki Saito ◽  
Tomoo Fujioka ◽  
Satoru Fujitsu ◽  
Kunihito Koumoto ◽  
...  
Keyword(s):  
Surface Modification ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Solid Oxides ◽  
Excimer Laser Irradiation

Wavelength Dependence of Excimer Laser Irradiation Effects on Ethylene-Tetrafluoroethylene Copolymer

1994 ◽  
Vol 33 (Part 1, No. 8) ◽  
pp. 4764-4768 ◽  
Author(s):  
Yuji Hamada ◽  
Shunichi Kawanishi ◽  
Masanobu Nishii ◽  
Shun'ichi Sugimoto ◽  
Tadashi Yamamoto
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Wavelength Dependence ◽  
Irradiation Effects ◽  
Excimer Laser Irradiation ◽  
Ethylene Tetrafluoroethylene

Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation

1996 ◽  
Vol 35 (Part 2, No. 11B) ◽  
pp. L1473-L1475 ◽  
Author(s):  
Kuninori Kitahara ◽  
Katsuyuki Suga ◽  
Akito Hara ◽  
Kazuo Nakajima
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phase Variation ◽  
Excimer Laser Irradiation ◽  
Amorphous Si

Polycrystalline silicon recrystallized with excimer laser irradiation and impurity doping using ion doping method

1993 ◽  
Vol 73 (7) ◽  
pp. 3271-3275 ◽  
Author(s):  
Yutaka Miyata ◽  
Mamoru Furuta ◽  
Tatsuo Yoshioka ◽  
Tetsuya Kawamura
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Ion Doping ◽  
Impurity Doping ◽  
Excimer Laser Irradiation

Surface Alteration of Amorphous Si3N4 Films by ArF Excimer Laser Irradiation

1995 ◽  
Vol 34 (Part 2, No. 11A) ◽  
pp. L1482-L1485 ◽  
Author(s):  
Kazuo Nakamae ◽  
Kou Kurosawa ◽  
Yasuo Takigawa ◽  
Wataru Sasaki ◽  
Yasukazu Izawa ◽  
...  
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Surface Alteration ◽  
Excimer Laser Irradiation ◽  
Arf Excimer Laser ◽  
Amorphous Si3n4

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation
Sign in / Sign up

Export Citation Format

Share Document