Mechanical and elastic properties of amorphous hydrogenated silicon films studied by broadband surface acoustic wave spectroscopy

1995 ◽  
Vol 61 (3) ◽  
pp. 269-276 ◽  
Author(s):  
R. Kuschnereit ◽  
H. Fath ◽  
A.A. Kolomenskii ◽  
M. Szabadi ◽  
P. Hess
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Elastic Properties ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

Elastic properties of amorphous hydrogenated silicon films

1991 ◽  
Vol 80 (2) ◽  
pp. 139-140 ◽  
Author(s):  
Hua Xia ◽  
X.K. Zhang ◽  
K.J. Chen ◽  
Wei Zhang ◽  
Y.Y. Chen ◽  
...  
Keyword(s):  
Elastic Properties ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

Advanced modeling for optical characterization of amorphous hydrogenated silicon films

2013 ◽  
Vol 541 ◽  
pp. 12-16 ◽  
Author(s):  
Daniel Franta ◽  
David Nečas ◽  
Lenka Zajíčková ◽  
Ivan Ohlídal ◽  
Jiří Stuchlík
Keyword(s):  
Optical Characterization ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

Comparative study of hydrogen evolution from amorphous hydrogenated silicon films

1982 ◽  
Vol 90 (2) ◽  
pp. 145-152 ◽  
Author(s):  
W. Beyer ◽  
H. Wagner ◽  
J. Chevallier ◽  
K. Reichelt
Keyword(s):  
Comparative Study ◽  
Hydrogen Evolution ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon
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