Thermoluminescence and ESCA investigations in polymer resist layers

Relationships of Polymeric Structure and Properties - Progress in Colloid & Polymer Science ◽

10.1007/bfb0114356 ◽

2007 ◽

pp. 113-115 ◽

Cited By ~ 1

Author(s):

R. Kunze ◽

M Wäsche ◽

E. Linke

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