1990 ◽  
Vol 41 (9) ◽  
pp. 5825-5842 ◽  
Author(s):  
Kun Huang ◽  
Bang-fen Zhu ◽  
Hui Tang

1993 ◽  
Vol 298 ◽  
Author(s):  
Zhang Rong ◽  
Zheng Youdou ◽  
Gu Shulin ◽  
Hu Liqun

AbstractRaman scattering measurements have been carried out on Si1-xGex/Si SLS. It is found that the Ge–Ge optic phonon frequency shift is proportional to strain in the SiGe film, and the Ge–Ge strain shift coefficient is 408cm−1. Based on these study a new method for analyzing the Raman spectra of SiGe/Si SLS has been proposed. Using the new method we can obtain the composition of the alloy sublayers as well as the strain in SLS. The strain distribution in the SiGe/Si SLS has been discussed, and strain in both SiGe and Si sublayers of the SLS have been calculated.


1983 ◽  
Vol 44 (11) ◽  
pp. 313-318 ◽  
Author(s):  
Masaaki Takashige ◽  
Terutaro Nakamura ◽  
Yutaka Aikawa

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