Characterization of an argon-hydrogen microwave discharge used as an atomic hydrogen source. Effect of hydrogen dilution on the atomic hydrogen production

1997 ◽  
Vol 17 (2) ◽  
pp. 193-206 ◽  
Author(s):  
L. Thomas ◽  
J. L. Jauberteau ◽  
I. Jauberteau ◽  
J. Aubreton ◽  
A. Catherinot
2021 ◽  
Vol 291 ◽  
pp. 112631
Author(s):  
Franciele Pereira Camargo ◽  
Isabel Kimiko Sakamoto ◽  
Tiago Palladino Delforno ◽  
Mahendra Mariadassou ◽  
Valentin Loux ◽  
...  

2009 ◽  
Vol 1153 ◽  
Author(s):  
A. J. Syllaios ◽  
S. K. Ajmera ◽  
G. S. Tyber ◽  
C. L. Littler ◽  
R. E. Hollingworth

AbstractAn increasingly important application of thin film hydrogenated amorphous silicon (α-Si:H) is in infrared detection for microbolometer thermal imaging arrays. Such arrays consist of thin α-Si:H films that are integrated into a floating thermally isolated membrane structure. Among the α-Si:H material properties affecting the design and performance of microbolometers is the microstructure. In this work, Raman spectroscopy is used to study changes in the microstructure of protocrystalline p-type α-Si:H films grown by PECVD as substrate temperature, dopant concentration, and hydrogen dilution are varied. The films exhibit the four Raman spectral peaks corresponding to the TO, LO, LA, and TA modes. It is found that the TO Raman peak becomes increasingly well defined (decreasing line width and increasing intensity), and shifts towards the crystalline TO energy as substrate temperature is increased, H dilution of the reactants is increased, or as dopant concentration is decreased.


ACS Omega ◽  
2021 ◽  
Author(s):  
Wei Guo ◽  
XianFeng Zheng ◽  
ZhengBo Qin ◽  
QiJia Guo ◽  
Lei Liu

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