PECVD of SiOxNyCzHw thin films from hexamethyldisilazane containing feed. Investigation on chemical characteristics and aging behavior
2015 ◽
Vol 41
(6)
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pp. 7977-7981
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2018 ◽
Vol 89
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pp. 161-167
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2004 ◽
Vol 85
(7)
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pp. 1867-1869
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